Abstract
The paper presents the studies on technology of ~100 μm-emitting (~3 THz) Al0.15Ga0.85As/GaAs QCLs, the optimized scheme of fabrication of such lasers was elaborated. It was a result of the extensive work on decreasing waveguide losses while ensuring the proper performance of the electrical contacts and effective heat removal. The fabrication comprises Au-based claddings and Au-Au-mounting process. The yielded lasers operate up to the maximum temperature Tmax = 140 K, with threshold current density Jth ~ 1 kA/cm2 at 77 K.
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Acknowledgments
This research was supported by The National Centre for Research and Development (bilateral cooperation, project no. 1/POLTUR-1/2016).
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Szerling, A. et al. (2021). Crucial Aspects of the Device Processing of Quantum Cascade Lasers. In: Pereira, M.F., Apostolakis, A. (eds) Terahertz (THz), Mid Infrared (MIR) and Near Infrared (NIR) Technologies for Protection of Critical Infrastructures Against Explosives and CBRN. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-94-024-2082-1_4
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