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Microfabricated and Nanoengineered Chemical Sensors for Air Quality Monitoring System

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Smart Sensors for Health and Environment Monitoring

Part of the book series: KAIST Research Series ((KAISTRS))

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Abstract

The importance of air quality monitoring is rapidly increasing. Although state-of-the-art air quality monitoring systems based on sophisticated optical systems or gas chromatography provide high accuracy measurement of air quality parameters, they cannot provide highly portable and/or personalized platform due to high cost, difficult maintenance and poor portability. With the advent of mobile electronic systems such as smartphones or wearable gadgets, people are more interested in obtaining personalized and highly localized environmental information rather than averaged and global information. To meet this need, highly integrated, ultra-compact, and low-power gas sensors that can be put into small electronic systems should be developed. The best approach to enable this is to use microfabricated (i.e., MEMS) sensing platform and nanoengineered sensing materials. In this chapter, we review the design and fabrication MEMS-based gas sensors and their applications to portable air quality monitoring. In addition, the principles, designs and the usage of functional nanomaterials to highly sensitive, highly selective and quickly responding air quality sensors are explained. Finally, we explain our recent development on the controlled synthesis of nanomaterials on microfabricated platform and its application to advanced gas sensing devices.

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Acknowledgements

This work is supported by the Center for Integrated Smart Sensors funded by the Ministry of Science, ICT & Future Planning as the Global Frontier Project.

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Authors and Affiliations

  1. Department of Mechanical Engineering & KI for the Nano Century, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, South Korea

    Inkyu Park, Daejong Yang & Kyungnam Kang

Authors
  1. Inkyu Park
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  2. Daejong Yang
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  3. Kyungnam Kang
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Corresponding author

Correspondence to Inkyu Park .

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Editors and Affiliations

  1. Electrical Engineering Center for Integrated Smart Sensors, KAIST, Daejoen, Korea, Republic of (South Korea)

    Chong-Min Kyung

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Park, I., Yang, D., Kang, K. (2015). Microfabricated and Nanoengineered Chemical Sensors for Air Quality Monitoring System. In: Kyung, CM. (eds) Smart Sensors for Health and Environment Monitoring. KAIST Research Series. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9981-2_6

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  • DOI: https://doi.org/10.1007/978-94-017-9981-2_6

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-017-9980-5

  • Online ISBN: 978-94-017-9981-2

  • eBook Packages: EngineeringEngineering (R0)

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