Abstract
Mass and energy dispersive recoil spectrometry (RS) is an elemental depth profiling technique suitable for characterisation of thin-film III–V structures which are difficult to study using Rutherford backscattering spectrometry. The technique is demonstrated by applying it to interfacial reaction studies between (100) InP and the metals, Ni, Pd and Pt. The InP samples were covered by a 50 nm thick layer of metal and then subjected to thermal treatment for 30 minutes at 250, 350, and 500 °C. Separate characterisation of the metal, In and P depth distributions were performed, which clearly show the different behaviour of the three systems.
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© 1995 Springer Science+Business Media Dordrecht
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Persson, L. et al. (1995). Recoil Spectrometry: A Suitable Method for Studying Interfacial Reactions in Metal-InP Systems. In: Misaelides, P. (eds) Application of Particle and Laser Beams in Materials Technology. NATO ASI Series, vol 283. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8459-3_32
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DOI: https://doi.org/10.1007/978-94-015-8459-3_32
Publisher Name: Springer, Dordrecht
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