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Application of Particle and Laser Beams in Materials Technology pp 387–398Cite as

Quantitative Determination of Light Elements in Semiconductor Matrices by Charged Particle Activation Analysis

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Part of the book series: NATO ASI Series ((NSSE,volume 283))

Abstract

This contribution presents the theoretical basis and the methodology of application of the Charged Particle Activation Analysis (CPAA) for the determination of trace amounts of light elements in semiconductor matrices.

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  1. Department of Chemistry, Aristotle University, GR-54006, Thessaloniki, Greece

    P. Misaelides

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  1. P. Misaelides
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  1. Department of Chemistry, Aristotle University, Thessaloniki, Greece

    P. Misaelides

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Misaelides, P. (1995). Quantitative Determination of Light Elements in Semiconductor Matrices by Charged Particle Activation Analysis. In: Misaelides, P. (eds) Application of Particle and Laser Beams in Materials Technology. NATO ASI Series, vol 283. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8459-3_25

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  • DOI: https://doi.org/10.1007/978-94-015-8459-3_25

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-4510-2

  • Online ISBN: 978-94-015-8459-3

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