Abstract
The surface concentration changes induced by 3-keV Ar+ sputtering in polycrystalline zirconium dioxide were studied using X-ray photoelectron spectroscopy. It was shown that bombardment leads to a gradual build-up of an oxygen depletion layer that was described by its averaged composition and the in-depth distribution of the elemental concentration as a function of the ion dose. These parameters during the depth profiling process were simulated by means of a dynamic Monte-Carlo computer code. Several simple depth-profile approximations showing the necessity of data-processing were discussed. A comparison between the simulated profiles and the experimental results was made taking into consideration the real surface concentration and the one “observed” by XPS.
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© 1995 Springer Science+Business Media Dordrecht
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Miteva, V., Stanchev, A., Stefanov, P., Slavova, V., Kostov, K. (1995). Experimental and Monte-Carlo Simulation Studies of the Surface Concentration Changes in ZrO2 under Ion Bombardment. In: Misaelides, P. (eds) Application of Particle and Laser Beams in Materials Technology. NATO ASI Series, vol 283. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8459-3_11
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DOI: https://doi.org/10.1007/978-94-015-8459-3_11
Publisher Name: Springer, Dordrecht
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