Abstract
We have seen how controlled environments can provide us with an appropriate place for the production of or research into sensitive materials, processes, or artifacts. As we discussed in Chapter 1, however, the very nature of high-technology industry creates a drive toward increasing complexity, and this more often than not increases the sensitivity factor. To use the semiconductor industry as an example, at the time of writing this book, more than 50 percent of the wafer starts in the United States involved technologies with linewidths below 2 microns. This suggests particle control at 0.2 microns and below in leading edge high-volume facilities. In addition, we are also witnessing the emergence on the market of super-high density components such as 4 megabit dynamic RAMs (memories) with claims that 64 megabit components are near to fruition.
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© 1991 Van Nostrand Reinhold
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Kozicki, M., Hoenig, S., Robinson, P. (1991). The Future of Controlled Environments. In: Cleanrooms. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-7950-8_13
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DOI: https://doi.org/10.1007/978-94-011-7950-8_13
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-011-7952-2
Online ISBN: 978-94-011-7950-8
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