Abstract
Bulk silicon samples prepared with different surface chemistry (hydrophobic and hydrophilic) as well as different morphologies (polished and corrugated) were subjected to friction and adhesion tests using a novel micro-triboscopy tester. This tester allows the evaluation of planar as well as curved samples in the mN to nN force range. The samples do not have to be transparent and can vary in thickness and size. Hydrophobic surfaces show lower adhesion but clear stick/slips in friction experiments. In contrast, hydrophilic surfaces adhere stronger but show lower friction. Surface modification by geometric means revealed that the application of a corrugated surface is the most effective way to reduce friction and adhesion.
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© 1998 Springer Science+Business Media Dordrecht
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Scherge, M., Schaefer, J.A. (1998). Surface Modification and Mechanical Properties of Bulk Silicon. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_39
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DOI: https://doi.org/10.1007/978-94-011-5050-7_39
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6121-6
Online ISBN: 978-94-011-5050-7
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