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Formation of Nanometer-Scale Contacts to Viscoelastic Materials

Implications for MEMS

  • Conference paper
Tribology Issues and Opportunities in MEMS

Abstract

The making and breaking of nanometer-scale contacts is an essential operation in MEMS devices with moving parts. The behavior of contacts in this size range is not well understood, especially if viscoelastic materials are involved. This article describes shear modulation spectroscopy, a new scanning force microscope technique especially well suited for quantitative studies of nanometer-scale contacts to viscoelastic materials such as lubricants and some polymers. The technique is illustrated by measurements and analysis of contacts to poly(vinylethylene).

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Author information

Authors and Affiliations

  1. Code 6170, Naval Research Laboratory, Washington, DC, 20375-5342, USA

    K. J. Wahl

  2. Laboratory for Surface Science & Technology, University of Maine, Orono, ME, 04469, USA

    W. N. Unertl

Authors
  1. K. J. Wahl
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  2. W. N. Unertl
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Editor information

Editors and Affiliations

  1. Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio, USA

    Bharat Bhushan

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© 1998 Springer Science+Business Media Dordrecht

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Wahl, K.J., Unertl, W.N. (1998). Formation of Nanometer-Scale Contacts to Viscoelastic Materials. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_19

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  • DOI: https://doi.org/10.1007/978-94-011-5050-7_19

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6121-6

  • Online ISBN: 978-94-011-5050-7

  • eBook Packages: Springer Book Archive

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