Abstract
The advancement of the micro-miniaturization and technologies have motivated the search for a technique which will permit precision manipulation in the worlds of microns. This paper presents the development of a three degree-of-freedom (DOF) micro-motion in-parallel actuated manipulator. The micro-motion manipulator, which has one translation and two orientation freedoms, is actuated by piezoelectric effect. In particular, the paper presents a closed-form solution and an experimental verification of the forward kinematics. In addition, the dynamic model of the piezoelectric actuated link was determined experimentally providing a rational basis for the design and prismatic joint force control of the high speed micro-motion manipulator. A special configuration which approaches an optimal design, in terms of working range, rigidity, and bandwidth, has also been highlighted.
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References
A. J. Blodgett, Jr., “Microelectronic packaging,” Scientific American pp. 86–96, July, 1983.
G. M. Robinson, “How advanced motion control enhances cancer treatment,” Design News, pp. 72–76, September 21,1987.
G. Haugen, “Micro miniaturization is finding application beyond electronics,” Research and Development, pp. 66–69, March 1987.
N. Taniguchi, “Current status in, and future trends of, ultraprecision machining and ultrafine materials processing,” CIRP Annuals. Vol. 32/2, pp. 573–582,1983.
W. S. N. Trimmer and K. J. Gabriel, “Design Considerations for a Practical Electrostatic Micro-Motor,” Sensors and Actuators. 11, pp. 189–206,1987.
M. M. Mehregany, K. J. Gabriel, and W. S. N. Trimmer, “Micro Gears and Turbines Etched from Silicon,” Sensors and Actuators. 12, pp. 341–348,1987.
H. Fujita, “Studies of micro actuators in Japan,” in Proceedings of International Conference on Robotics and Automation. Scottsdale, Arizona, May 14–19, pp. 1559–1565.
S. C. Jacobsen, R. H. Price, J. E. Wood, T. H. Rytting, and M. Rafaelof, “The wobble motor: design, fabrication and testing of an eccentric-motion electrostatic microactuator,” in Proceedings of IEEE International Conference on Robotics and Automation. Scottsdale, Arizona, May 14–19, pp. 1535–1546,1989.
J. H. Lang, M. F. Scklecht, and R. T. Howe, “Electric micromotors: Electromechanical characteristics,” Proceedings of the IEEE Micro-Robots and Teleoperators Workshop. (Hyannis, Mass., November 9–11 1987)
P. Lebet, “Assembly with robots in micro-engineering,” Proceedings of the International Conference on Assembly Automation, pp. 29–40,1982.
A. Sharon, and D. Hardt, “Enhancement of robot accuracy using endpoint feedback and a macro-micro manipulator system,” Proceedings of 1984 American Control Conference. (San Diego, California, June 6–8,1984) Pp. 1836–1842.
R. L Hollis, “A Fine Positioning device for enhancing robot precision,” Robots 9. (Detroit, June 2–6,1985) Pp. 6.28–6.36.
H. T. Russell, R. L. Hollis, and M. A. Lavin, “Precise manipulation with endpoint sensing,” IBM Journal of Research and Development 29[4], pp. 363–376,1985.
R. L. Hollis et. al., “Robotic circuit board testing using fine positioners with fiber optic sensing,” Proceedings of International Symposium on Industrial Robots. Sept. 11–13, pp. 315–322, 1985.
R. L. Hollis et. al., “A six degree of freedom magnetically levitated variable compliance fine motion wrist,” Proceedings of the 1988 IEEE International Conference on Robotics and Automation. (Philadelphia, PA, April 25–29,1988) Pp. 261–269.
J. H. Bruning, “The piezoelectric worm-A submicron linear positioning device,” Proceedings of Fourth Annual Symposium of Incremental Motion control Systems and Devices. (Univ. of Illinois-Urbana Champaign, April 1–3,1975) pp. x-1 to x–11.
F. E. Scire and E. C. Teague, “Piezodriven 50 micro stage with subnometer,” Rev. Sci. Instrum., 49(12), Dec. 1978.
Y. Umetani, “Principle of a piezoelectric micro manipulator,” in Proceedings of the 8th International Symposium on Industrial Robots. Stuttgart, May 30 -June 1, pp. 406–413,1978.
Y. Umetani, and H. Suzuki, “Piezoelectric micro-manipulator in multi-degrees of freedom with tactile sensibility,” in Proceedings of the 10th International Symposium on Industrial Robots. Milan, March 5-7, pp. 571–579,1980.
R. D. Young, “Moving stage improves accuracy of microcircuit measuring technique,” Research and Development, pp. 114–116, April 1984.
L. H. McCarty, “Piezoelectric actuators generate many motion patterns,” Design News, pp. 136–138, June 8,1987.
Z. X. Wang, M. K. Jouaneh, and D. Dornfeld, “Design and characterization of a linear motion piezoelectric microactuator,” in Proceedings of the IEEE International Conference on Robotics and Automation. Scottsdale, Arizona, May 14–19, pp. 1710–1715, 1989.
K-M. Lee and S. Arjunan, “Force/torque sensing and micro-motion manipulation of a spherical stepping wrist motor,” Proceedings of the 1988 American Control Conference (Atlanta, GA, June 1988).
K-M. Lee and S. Arjunan, “A three degree of freedom micro-motion in-parallel actuated manipulator,” in Proceedings of the IEEE International Conference on Robotics and Automation. Scottsdale, Arizona, May 14-19, pp. 1698–1703,1989.
I. W. Hunter, S. Lafontaine, P. M. F. Nielsen, P. J. Hunter, and J. M. Hollerbach, “A tele-microrobot for manipulation and dynamic mechanical testing of single living cells,” in Proceedings of the IEEE Workshop on Micro Electro Mechanical Systems. Salt Lake City, Feb. 20–22, pp. 102–106,1989
I. W. Hunter, S. Lafontaine, P. M. F. Nielsen, P. J. Hunter, and J. M. Hollerbach., “Manipulation and dynamic mechanical testing of microscopic objects using a telemicrorobot system,” in Proceedings of the IEEE International Conference on Robotics and Automation, Scottsdale, Arizona, May 14–19, pp. 1536–1546,1989.
H. S. Tzou, “Development of a light-weight robot end-effector using polymeric piezoelectric bimorph,” in Proceedings of the IEEE International Conference on Robotics and Automation. Scottsdale, Arizona, May 14–19, pp. 1704–1709,1989.
H. S. Tzou, G. C. Wan, and C. I. Tseng, “Dynamics and distributed vibration controls of flexible manipulators: integrated distributed sensing and active piezoelectric actuator,” in Proceedings of the IEEE International Conference on Robotics and Automation. Scottsdale, Arizona, May 14–19, pp. 1716–1725,1989.
W. Trimmer and R. Jebens, “Actuators for micro robots,” in Proceedings of the IEEE International Conference on Robotics and Automation. Scottsdale, Arizona, May 14–19, pp. 1547–1552,1989.
K-M. Lee and D. Shah, “Kinematic analysis of a three degree of freedom in-parallel actuated manipulator,” Proceedings of the 1987 IEEE International Conference of Robotics and Automation. (Raleigh, NC, March 31-April 3, 1987) Also in IEEE Journal of Robotics and Automation, Vol. 4, Issue 2, pp. 354–360, June 1988.
K-M. Lee and D. Shah, “Dynamic analysis of a three degree of freedom in-parallel actuated manipulator,” IEEE Journal of Robotics and Automation. Vol. 4, Issue 2, pp. 361–367, June 1988.
K-M. Lee and R. Johnson, “Static characteristics of an in-parallel actuated manipulator for changing and bracing applications,” in Proceedings of the IEEE International Conference on Robotics and Automation. Scottsdale, Arizona, May 14–19, pp. 1408–1415,1989.
Tokin manufacturer’s booklet on multilayer piezoelectric actuators.
M. D. Byrant and R. B. Reeves, “Precision positioning problems using piezoelectric actuators with force transmission through mechanical contact,” Precision Engineering. Vol. 6, no. 3, pp. 129–134, July 1984.
J. Winger and K-M. Lee, “Experimental investigation of a tactile sensor based on bending losses in fiber optics,” Proceedings of the 1988 IEEE International Conference on Robotics and Automation. (Philadelphia, PA, April 26–29,1987).
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© 1992 Springer Science+Business Media Dordrecht
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Lee, KM., Arjunan, S. (1992). A Three Degrees of Freedom Micro-Motion In-Parallel Actuated Manipulator. In: Tzou, H.S., Fukuda, T. (eds) Precision Sensors, Actuators and Systems. Solid Mechanics and Its Applications, vol 17. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1818-7_9
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DOI: https://doi.org/10.1007/978-94-011-1818-7_9
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