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A Three Degrees of Freedom Micro-Motion In-Parallel Actuated Manipulator

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Precision Sensors, Actuators and Systems

Part of the book series: Solid Mechanics and Its Applications ((SMIA,volume 17))

Abstract

The advancement of the micro-miniaturization and technologies have motivated the search for a technique which will permit precision manipulation in the worlds of microns. This paper presents the development of a three degree-of-freedom (DOF) micro-motion in-parallel actuated manipulator. The micro-motion manipulator, which has one translation and two orientation freedoms, is actuated by piezoelectric effect. In particular, the paper presents a closed-form solution and an experimental verification of the forward kinematics. In addition, the dynamic model of the piezoelectric actuated link was determined experimentally providing a rational basis for the design and prismatic joint force control of the high speed micro-motion manipulator. A special configuration which approaches an optimal design, in terms of working range, rigidity, and bandwidth, has also been highlighted.

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© 1992 Springer Science+Business Media Dordrecht

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Lee, KM., Arjunan, S. (1992). A Three Degrees of Freedom Micro-Motion In-Parallel Actuated Manipulator. In: Tzou, H.S., Fukuda, T. (eds) Precision Sensors, Actuators and Systems. Solid Mechanics and Its Applications, vol 17. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1818-7_9

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  • DOI: https://doi.org/10.1007/978-94-011-1818-7_9

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4802-6

  • Online ISBN: 978-94-011-1818-7

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