Abstract
Focused ion beams present a unique tool for microfabrication by micromachining and deposition. Liquid metal ion sources provide a low emittance quasi point source capable of being focused to spots of a few tens of nanometres using electric lenses. Preliminary models for machining and deposition processes have been developed but more work is required. The technology is already being applied in a number of important applications including mask and reticle repair and “chip surgery”.
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© 1993 Springer Science+Business Media Dordrecht
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Prewett, P.D. (1993). Focused Ion Beams and their Applications in Microfabrication. In: Binh, V.T., Garcia, N., Dransfeld, K. (eds) Nanosources and Manipulation of Atoms Under High Fields and Temperatures: Applications. NATO ASI Series, vol 235. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1729-6_12
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DOI: https://doi.org/10.1007/978-94-011-1729-6_12
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