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Electron Spectroscopic Analysis of Multicomponent Thin Films with Particular Emphasis on Oxides

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Book cover Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

Part of the book series: NATO ASI Series ((NSSE,volume 234))

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Abstract

Electron spectroscopic analysis of thin films is discussed with particular emphasis on the analysis of multicomponent oxide thin films. The basic principles of electron spectroscopy for chemical analysis (ESCA) are discussed. Detailed descriptions of instrumentation and established advanced ESCA procedures are presented, the later focused on ESCA induced valence band spectra, including studies of tetrahedral compound semiconductors, sputter-deposited GeO2, and defects in suboxides. X-ray photoelectron spectroscopy of high temperature superconductors is discussed and arguments are presented for the interpretation of the data in terms of bonding and electronic structure. Specific materials discussed include simple copper oxides and superconducting oxides containing copper.

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Author information

Authors and Affiliations

  1. Department of Materials and Laboratory of Surface Studies, University of Wisconsin - Milwaukee, Milwaukee, 53201, WI, USA

    T. L. Barr (Fulbright Visiting Professor)

  2. Department of Chemistry, University of Cambridge, Cambridge, CB1-3NW, UK

    T. L. Barr (Fulbright Visiting Professor)

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  1. T. L. Barr
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Editors and Affiliations

  1. MCNC, Center for Microelectronics, System Technologies, Research Triangle Park, North Carolina, USA

    Orlando Auciello

  2. Microstructure Research Center, University of Wuppertal, Wuppertal, Germany

    Jürgen Engemann

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Barr, T.L. (1993). Electron Spectroscopic Analysis of Multicomponent Thin Films with Particular Emphasis on Oxides. In: Auciello, O., Engemann, J. (eds) Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices. NATO ASI Series, vol 234. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1727-2_16

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  • DOI: https://doi.org/10.1007/978-94-011-1727-2_16

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4757-9

  • Online ISBN: 978-94-011-1727-2

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