Skip to main content
SpringerLink
Log in

Computer-Aided Optimization of Electrothermal CMOS-Compatible Infrared Sensors

  • Conference paper
Thermal Management of Electronic Systems

Abstract

We present a detailed study of the operation of miniaturized electrothermal infrared detectors. On the basis of a three-dimensional numerical thermal analysis, the sensor performance is optimized with respect to several structural parameters. Moreover, we validate an analytical model of integrated thermopiles from which we deduce general scaling laws for the practical design. We find that an unconventional topography, namely a meander geometry, may significantly enhance the sensor output signal.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Lenggenhager, R., Baltes, H., and Elbel, T.: Thermoelectric infrared sensors in CMOS technology. Sensors and Actuators A 37-38 (1993) 216–220.

    Article  Google Scholar 

  2. Baltes, H.: Microtransducers by industrial IC technologies and micromachining. Tech. Digest 10th Sensor Symposium, IEE Japan, Tokyo (1992) 17–23.

    Google Scholar 

  3. Baltes, H., et al.: Silicon microsensors and microstructures. Proc. 1992 IEEE Int. Symp. on Circuits and Systems, IEEE, Piscataway (1992) 1820–1823.

    Chapter  Google Scholar 

  4. Anderheggen, E. et al.: SESES — a two-and three-dimensional semiconductor sensor simulation program. Proc. NASECODE VIII, Vienna (1992) 76-78.

    Google Scholar 

  5. Funk, J., Wachutka, G., and Baltes, H.: Scaling laws for optimized design of integrated thermopiles. Digest of Technical Papers, Transducers′93, Tokyo (1993) 742-745.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Physical Electronics Laboratory, ETH Zurich, 8093, Zurich, Switzerland

    G. Wachutka, J. Funk & H. Baltes

Authors
  1. G. Wachutka
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Funk
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. H. Baltes
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. J. M. Burgers Centre for Fluid Mechanics, Delft University of Technology, Delft, The Netherlands

    C. J. Hoogendoorn  & R. A. W. M. Henkes  & 

  2. Philips B.V., Eindhoven, The Netherlands

    C. J. M. Lasance

Rights and permissions

Reprints and permissions

Copyright information

© 1994 Springer Science+Business Media Dordrecht

About this paper

Cite this paper

Wachutka, G., Funk, J., Baltes, H. (1994). Computer-Aided Optimization of Electrothermal CMOS-Compatible Infrared Sensors. In: Hoogendoorn, C.J., Henkes, R.A.W.M., Lasance, C.J.M. (eds) Thermal Management of Electronic Systems. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1082-2_12

Download citation

  • DOI: https://doi.org/10.1007/978-94-011-1082-2_12

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4472-1

  • Online ISBN: 978-94-011-1082-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation