Abstract
The great attention attracted at present to the problem of hydrogenation of a diamond is caused by the fact that CVD diamond grows from the gas phase containing more than 90% of hydrogen, which is able to penetrate into the structure of growing film. In opinion of a number of authors [1,2,3,4] hydrogen influences upon conductivity of CVD diamond films (DF) and single diamond crystals, which opens perspectives to modify the electrophysical properties of CVD diamond by hydrogen treatment.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
5. References
Landstrass, M.L. and Ravi, K.V. (1989) Hydrogen passivation of electrically active defects in diamond, Appl. Phys. Lett.55(14), 1391–1393.
Landstrass, M.L. and Ravi, K.V. (1989) Resistivity of chemical vapour deposited diamond films, Appl. Phys. Lett.55(10), 975–977.
Albin, S. and Watkins, Z. (1990) Current-voltage characteristics of thin films and bulk diamond treated in hydrogen plasma, IEEE Electron Device Lett.11(4), 159–161.
Mori, Y. et al (1993) Characterization of surface conductive diamond layer grown by microwave plasma chemical vapour deposition, Jpn. J. Appl. Phys.32L, 987–989.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1995 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Sokolina, G.A., Bouilov, L.L., Botev, A.A., Markin, A.V., Timofeev, M.A. (1995). Surface and Bulk Conductivity of Hydrogen Treated Polycrystalline Diamond. In: Prelas, M.A., Gielisse, P., Popovici, G., Spitsyn, B.V., Stacy, T. (eds) Wide Band Gap Electronic Materials. NATO ASI Series, vol 1. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0173-8_12
Download citation
DOI: https://doi.org/10.1007/978-94-011-0173-8_12
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-4078-5
Online ISBN: 978-94-011-0173-8
eBook Packages: Springer Book Archive