Abstract
Surface chemical reactions of hydrogen with diamond are important events in the complex processes leading to diamond chemical vapor deposition (CVD). Our ongoing research addresses the surface reactions related to diamond growth. Studies were performed on single crystals, C(100) and C(110), and large grained polycrystalline CVD diamond films using a diverse array of ultra-high vacuum surface analytical techniques. Surface vibrational spectroscopies, high resolution electron energy loss spectroscopy (HREELS) and multiple internal reflection infrared spectroscopy (MIRIRS), were principal probes of surface structure, while HREELS and temperature programmed desorption (TPD) were used to investigate hydrogen adsorption, abstraction, and desorption. We found: (1) the C(100), C(110) and polycrystalline diamond surfaces are terminated primarily with CH species; (2) the ratio of H atom abstraction to adsorption is 0.05 ± 0.01; (3) hydrogen desorbs molecularly from C(110) peaking at 892 C and exhibits first order desorption kinetics with an activation energy of 75 kcal/mole; and (4) both clean and hydrogen-saturated C(100) surfaces display a 2x1 surface reconstruction.
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8. References
DeVries, R. C. (1987) Synthesis of diamond under metastable conditions, Ann. Rev. Mat. Sci. 17, 161–187.
Angus, J. C. and Hayman, C. C. (1988) Low pressure, metastable growth of diamond and “diamondlike” phases, Science 241, 913–921.
Spear, K. E. (1989) Diamond -ceraminc coating of the future, J. Am. Ceram. Soc. 72, 171–191.
Celii, F. G. and Butler, J. E. (1991) Diamond chemical vapor deposition, Ann. Rev. Phys. Chem. 42, 643–684.
Davis, R. F. (ed.) (1993) Diamond Films and Coatings: Development, Properties, and Applications, Noyes Publications, Park Ridge, NJ.
Spear, K. E. and Dismukes, J. P. (eds.), (1993) Synthetic Diamond: Emerging CVD Science and Technology, John Wiley, New York.
Messier, R., Glass, J. T., Butler, J. E. and Roy, R. (eds.) (1990) Proceedings of the 2nd International Conference on New Diamond Science and Technology, Materials Research Society, Pittsburgh.
Tzeng, Y., Yoshikawa, M., Murakawa, M. and Feldman A. (eds.) (1991) Applications of Diamond Films and Related Materials, Elsevier, Amsterdam.
Bachmann, P. K. and Matthews, A.,(eds.) (1991) Diamond, Diamondlike and Related Coatings, Elsevier, Amsterdam.
a. Celii, F. G. and Butler, J. E. (1989) Hydrogen atom detection in the filament-assisted diamond deposition environment, Appl. Phys. Lett. 54, 1031–1033.
Celii, F. G., Thorsheim, H. R., Butler, J. E., Piano, L. S. and Pinneo, J. M. (1990) Detection of ground-state atomic hydrogen in a dc plasma using third-harmonic generation, J. Appl. Phys. 68, 3814–3817.
Anthony, T. R. (1990) Metastable synthesis of diamond, Vacuum 41, 1356–1359.
Butler, J. E. and Woodin, R. L., (1993) Thin film diamond growth mechanisms, Phil. Trans. R. Soc. Lond. A 342, 209–224.
Page, M. and Brenner, D. W., (1991) Hydrogen abstraction from a diamond surface. Ab initio quantum chemical study with constrained isobutane as a model, J. Am. Chem. Soc. 113, 3270–3274.
Huang, D. and Frenklach, M. (1992) Energetics of surface reactions on (100) diamond plane, J. Phys. Chem. 96, 1868–1875.
Pate, B. B., Hecht, M. H., Binns, C., Lindau, I. and Spicer, W. E., (1982) Photoemission and photon-stimulated ion desorption studies of diamond(111): Hydrogen, J. Vac. Sci. Tech. 21, 364–367.
Angus, J. C., Will, H. A. and Stanko, W. S., (1968) Growth of diamond seed crystals by vapor deposition, J. Appl. Phys. 39, 2915–2922.
Yarbrough, W. A. and Messier, R. (1990) Current issues and problems in the chemical vapor deposition of diamond, Science 247, 688–696.
Thoms, B. D., Pehrsson, P. E. and Butler, J. E. (1994) A vibrational study of the adsorption and desorption of hydrogen on polycrystalline diamond, J. Appl. Phys. 75, 1804–1810.
Thoms, B. D., Owens, M. S., Butler, J. E. and Spiro, C.(in preparation).
McGonigal, M., Russell, Jr., J. N., Pehrsson, P. E., Maguire, H. and Butler, J. E. (submitted). Multiple internal reflection infrared spectroscopy of hydrogen adsorbed on diamond(110), J. Appl. Phys.
Thoms, B. D., Russell, Jr., J. N., Pehrsson, P. E. and Butler, J. E. (1994) Adsorption and abstraction of hydrogen on polycrystalline diamond, J. Chem. Phys. 100, 8425–8431.
Russell, Jr., J. N., Sellschop, J. P. F. and Butler, J. E. (in preparation) Thermal desorption from hydrogenated diamond(110).
Samples supplied by a) Norton, b) General Electric, c) Prof. Sellschop, and d) Prof. Maguire.
Westbrook, C. K., Warnatz, J. and Pitz, W. J. (1988), A detailed chemical kinetic reaction mechanism for the oxidation of iso-octane and n-heptane over an extended temperature range and its application to analysis of engine knock, in Twenty-second Symposium (International) on Combustion ,The Combustion Institute, Seattle, WA, p.893–901.
Brenner, D., private communication.
Harris, J. and Kasemo, B., (1981) On precursor mechanisms for surface reactions, Surface Sci. 105, L281–L287.
Redhead, P. A., (1962) Thermal desorption of gases, Vacuum 12, 203–211.
Thomas, R. E., Rudder, R. A., Markunas, R. J. (1992) Thermal desorption from hydrogenated and oxygenated diamond (100) surfaces, J. Vac. Sci. Technol. A 10, 2451–2457.
b. Hamza, A. V., Kubiak, G. D. and Stulen, R. H. (1990) Hydrogen chemisorption and the structure of the diamond C(100)-(2x1) surface, Surface Sci. 237, 35–52.
c. Kubiak, G. D., Schulberg, M. T. and Stulen, R. H. (1992) Erratum to “Hydrogen chemisorption and the structure of the diamond C(100)-(2x1) surface” Surface Sci. 277, 234.
d. Schulberg, M. T., Kubiak, G. D. and Stulen, R. H. (1992) Temperature programmed desorption of hydrogen and deuterium from CVD diamond samples, in C. L. Renschler, J. J. Pouch, and D. M. Cox (eds), Novel forms of carbon, Mat. Res. Soc. Symp. Proc. 207, Materials Research Society, Pittsburgh, PA, pp. 401–406.
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Butler, J.E., Thoms, B.D., McGonigal, M., Russell, J.N., Pehrsson, P.E. (1995). Hydrogen Chemistry on Diamond Surfaces. In: Prelas, M.A., Gielisse, P., Popovici, G., Spitsyn, B.V., Stacy, T. (eds) Wide Band Gap Electronic Materials. NATO ASI Series, vol 1. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0173-8_11
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