Abstract
An essential requirement for any type of machine designed to shape or structure matter is the ability to move a forming tool or probe in an accurate, prescribed path throughout a workspace. Since the advent of the scanning tunneling microscope, we have been evolving rapidly in our capabilities to perform this function from machine-controlled cutting edges, to cutting with lasers and ions, to e-beam lithography, to recent demonstrations of controllably positioning individual atoms on a suitable substrate with STM tips. Any of these approaches requires that the probe or probes be moved and located in the workspace with a positional accuracy significantly smaller than the dimensions of the smallest feature being fabricated, and that the positioning be accomplished within a time scale to make the fabrication process practical.
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References
Teague, E.C. (1993) Basic Concepts for Precision Instrument Design, American Society for Precision Engineering, Raleigh, North Carolina.
Teague, E.C. (1993) Generating and Measuring Displacements Up To 0.1 m to an Accuracy of 0.1 nm: Is It Possible?, in C.R.K. Marrian (ed), Technology of Proximal Probe Lithography, SPIE Optical Engineering Press, Bellingham, Washington, USA.
Teague, E.C. (1989) The National Institute of Standards and Technology Molecular Measuring Machine Project: Metrology and Precision Engineering Design, J. Vac.Sci.Technol.B7,1898–1902.
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© 1995 Springer Science+Business Media Dordrecht
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Teague, E.C. (1995). Limits to Mechanical Positioning and Displacement Measurements. In: Welland, M.E., Gimzewski, J.K. (eds) Ultimate Limits of Fabrication and Measurement. NATO ASI Series, vol 292. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0041-0_32
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DOI: https://doi.org/10.1007/978-94-011-0041-0_32
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