Abstract
We have developed several coating technologies using nano-particles. One of them is the gas deposition method (GDM). Several tens of nanometer sized particles are prepared by the gas evaporation method [1] in an evaporation chamber, and are directly carried by a gas flow into another chamber and ballistically deposited on a substrate to form films. This film formation method is called GDM [2].
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© 2000 Springer Science+Business Media Dordrecht
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Mihara, Y. (2000). Development of Coating Technologies Using Nano Particles. In: Pavesi, L., Buzaneva, E. (eds) Frontiers of Nano-Optoelectronic Systems. NATO Science Series, vol 6. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0890-7_18
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DOI: https://doi.org/10.1007/978-94-010-0890-7_18
Publisher Name: Springer, Dordrecht
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