Abstract
The uTAS proposed the full incorporation of analytical procedures, which include sampling, sample preparation or pretreatment and actual analysis, into flowing systems. To incorporate a full uTAS, it is important to develop the individual microfluidic components. Microfilter is one of the microfluidic devices for sample preparation. This paper presents a fabrication method for a vertical silicon mesh structure depth filter as well as the application of white blood cell filtration. The results are also compared with another fabricated horizontal flow silicon filter.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
He B., Tan L., Regnier F., Analytical Chemistry, 71, 1464–1468, (1999)
Wilding P., Kricka, L.J., Cheng, J., Hvichia G., Analytical Biochemistry, 257, 95–100, (1998)
Cheng J., Kricka, L.J., Sheldon E.L., Wilding P., Topics in Current Chemistry, 194, 216–231, (1998)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2002 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Chen, Y. et al. (2002). Microfabrication of A Si Mesh Structure Depth Filter. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0504-3_46
Download citation
DOI: https://doi.org/10.1007/978-94-010-0504-3_46
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3953-6
Online ISBN: 978-94-010-0504-3
eBook Packages: Springer Book Archive