Abstract
This paper reports an innovative micro electrophoresis chip, which is integrated with buried optical waveguides on glass substrates for on-line detection of biomedical samples. A novel buried optical waveguide structure using SU-8/SOG (spin-on-glass) double layers is demonstrated, which can increase light guiding efficiency due to large difference of refractive index between SU-8 (n = 1.8, after hard-baking) and organic-based SOG (n = 1.36). With this novel approach, delicate optical system and even microscopy are not required for biomedical sample detection, resulting in a more compact or even a portable detection system.
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References
J. R. Webster, M. A. Burns, D. T. Burke, C. H. Mastrangelo, Monolithic Capillary Electrophoresis Device with Integrated Fluorescence Detector, Anal. Chem. 73, pp, 1622–1626, (2001)
M. L. Chabinyc, D. T Chiu, J. C. McDonald, A. D. Stroock, J. F. Christian, A. M. Karger, G. M. Whitesides, An integrated fluorescence detection system in PDMS for microfluidic applications, Anal. Chem. 73, pp. 4491–4498, (2001)
Z. H. Liang, N. Chiem, G. Ocvirk, T. T and, K. Fluri, D, J. Harrison, Microfabrication of a planar absorbance and fluorescence cell for integrated capillary electrophoresis devices, Anal. Chem. 68, pp. 1040–1046 (1996)
C. H. Lin., G. B. Lee, Y. H. Lin, G. L. Chang, A Fast Prototyping Process for Fabrication of Microfluidic Systems on Soda-Lime Glass, J. Micromech. Microeng. 11, pp. 726–732, (2001)
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© 2002 Springer Science+Business Media Dordrecht
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Lin, CH., Lee, GB., Lin, CC., Chen, SH. (2002). Micro Electrophoresis Chips with On-chip Optical Waveguides Utilizing Novel Buried SU-8/SOG Double Layers. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0504-3_43
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DOI: https://doi.org/10.1007/978-94-010-0504-3_43
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3953-6
Online ISBN: 978-94-010-0504-3
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