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Micro/Nano Machined Devices Probing into Nano/Bio World

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Micro Total Analysis Systems 2002

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Abstract

This paper deals with miniaturized nano electro mechanical systems (NEMS) and applications to nano and bio technologies. Fabrication methods for NEMS are overviewed. Some examples on NEMS made by IC-compatible batch fabrication processes applied to the investigation of nano/bio field are described. Future prospects and implications of NEMS in terms of bio chemical application are also discussed.

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Author information

Authors and Affiliations

  1. CIRMM/IIS, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8558, Japan

    Hiroyuki Fujita

  2. CREST/JST, Japan

    Hiroyuki Fujita

Authors
  1. Hiroyuki Fujita
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Editor information

Editors and Affiliations

  1. The University of Tokushima, Tokushima, Japan

    Yoshinobu Baba

  2. Waseda University, Tokyo, Japan

    Shuichi Shoji

  3. University of Twente, Enschede, The Netherlands

    Albert van den Berg

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© 2002 Springer Science+Business Media Dordrecht

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Fujita, H. (2002). Micro/Nano Machined Devices Probing into Nano/Bio World. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0504-3_104

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  • DOI: https://doi.org/10.1007/978-94-010-0504-3_104

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-3953-6

  • Online ISBN: 978-94-010-0504-3

  • eBook Packages: Springer Book Archive

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