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The Chemistry of Transition Metal Carbides and Nitrides pp 290–310Cite as

Single-source precursors for the chemical vapor deposition of titanium and vanadium carbide and nitride

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Abstract

A comparative study of a series of 28 single organometallic precursors to the binary ceramic phases TiC, TiN, VC, VN is reported. The design of the molecules, their thermal behavior, and their use in CVD applications are described. The influence on the film composition of (1) the nature of the precursor ligands (Cp, Cp′, Cl, NR2 with R = Et, SiMe3); and (2) the CVD conditions (hot or cold wall, carrier gas, gas phase composition) is studied in the case of the best candidate precursors.

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Author information

Authors and Affiliations

  1. Laboratoire de Chimie de Coordination, Equipe ‘Précurseurs Moléculaires et Matériaux: Conducteurs, Céramiques et Catalyseurs’, CNRS-UP 8241, 205 route de Narbonne, 31077, Toulouse Cedex, France

    L. Valade, R. Choukroun & P. Cassoux

  2. CNRS-UP 8521, Institut de Science et Génie des Matériaux et Procédés, Université de Perpignan, 52 avenue de Villeneuve, 66860, Perpignan Cedex, France

    F. Teyssandier, L. Poirier & M. Ducarroir

  3. Laboratoire de Cristallochimie, Réactivité et Protection des Matériaux, Ecole Nationale Supérieure de Chimie, CNRS-URA 445, 118 route de Narbonne, 31077, Toulouse Cedex, France

    R. Feurer, P. Bonnefond & F. Maury

Authors
  1. L. Valade
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  2. R. Choukroun
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  3. P. Cassoux
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  4. F. Teyssandier
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  5. L. Poirier
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  6. M. Ducarroir
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  7. R. Feurer
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  8. P. Bonnefond
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  9. F. Maury
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Editor information

Editors and Affiliations

  1. Department of Chemical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia, 24061-0211, USA

    S. T. Oyama (Professor) (Professor)

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© 1996 Chapman & Hall

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Valade, L. et al. (1996). Single-source precursors for the chemical vapor deposition of titanium and vanadium carbide and nitride. In: Oyama, S.T. (eds) The Chemistry of Transition Metal Carbides and Nitrides. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1565-7_15

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  • DOI: https://doi.org/10.1007/978-94-009-1565-7_15

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7199-4

  • Online ISBN: 978-94-009-1565-7

  • eBook Packages: Springer Book Archive

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