Abstract
We use a novel technique to amplify small increases in the oxidation rate of laser irradiated silicon to successfully isolate a photonic contribution to the reaction induced by cw argon laser radiation. This method presents clear evidence of optical enhancement over the usual thermally induced growth rate.
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© 1988 Martinus Nijhoff Publishers
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Boyd, I.W., Micheli, F. (1988). Confirmation of the Wavelength Dependence of Silicon Oxidation Induced by Visible Radiation. In: Ehrlich, D.J., Nguyen, V.T. (eds) Emerging Technologies for In Situ Processing. NATO ASI Series, vol 139. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1409-4_19
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DOI: https://doi.org/10.1007/978-94-009-1409-4_19
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-7130-7
Online ISBN: 978-94-009-1409-4
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