Skip to main content
SpringerLink
Log in

Investigation of Preferential Sputtering Mechanisms by Analysing the Sample Surface and Near-Surface Region with AES and ISS

  • Chapter
Materials Modification by High-fluence Ion Beams

Part of the book series: NATO ASI Series ((NSSE,volume 155))

  • 153 Accesses

Abstract

Preferential sputtering of compounds and alloys results in a compositional change of the surface and near surface region compared to the bulk composition. This effect can be caused by different mechanisms and the resulting concentration profiles should be different. For segregation-induced preferential sputtering an enrichment in the outermost layer and a loss in the sublayers of the segregating compound is expected /1/, in contrast to collision dominated systems.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
eBook
USD 16.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. R. Kelly, Surf. Interf. Anal. 7(1985) 1.

    Article  CAS  Google Scholar 

  2. G. Betz and G.K. Wehner, in: Sputtering by Particle Bombardment II, ed., R. Behrisch (Springer, Berlin, 1983) p. 11.

    Google Scholar 

  3. For recent reviews, see e. g. H.H. Andersen, in: Ion Implantation and Beam Processing, eds., J.S. Williams and J.M. Poate (Academic Press, Sydney, 1984) p. 128; R. Kelly, in: Chemistry and Physics of Solid Surface V, eds., R. Vanselow and R. Howe (Springer, Berlin, 1984), p. 159.

    Google Scholar 

  4. For recent reviews, see e. g. H.H. Andersen, in: Ion Implantation and Beam Processing, eds., J.S. Williams and J.M. Poate (Academic Press, Sydney, 1984) p. 128; R. Kelly, in: Chemistry and Physics of Solid Surface V, eds., R. Vanselow and R. Howe (Springer, Berlin, 1984), p. 159.

    Google Scholar 

  5. R. Kelly, in: Materials Modification by High-Fluence Ion Beams (in this volume).

    Google Scholar 

  6. E. Taglauer, in: Materials Modification by High-Fluence Ion Beams (in this volume).

    Google Scholar 

  7. H.H. Andersen and H.L. Bay, Radiat. Eff. 21 (1972) 67.

    Article  Google Scholar 

  8. E. Taglauer and W. Heiland, Appl. Phys. Lett. 33 (1978) 950.

    Article  CAS  Google Scholar 

  9. E. Taglauer, Appl. Surf. Sci. 13 (1982) 80.

    Article  CAS  Google Scholar 

  10. R. Bastasz and J. Bohdansky in: Proc. Int. Symp. on Sputtering, eds.: P. Varga, G. Betz and F.P. Viehböck (Inst. Allg. Physik, TU Wien, 1980) p. 430.

    Google Scholar 

  11. P. Varga and E. Taglauer, Nucl. Instr. & Meth. B2 (1984) 800.

    Google Scholar 

  12. J.W. Gibbs, Trans. Connecticut Acad. Sci. 3 (1875–76) 108.

    Google Scholar 

  13. N.Q. Lam and H. Wiedersich, Nucl. Instr. & Meth. B18 (1987) 471–485.

    CAS  Google Scholar 

  14. B. Baretzky and E. Taglauer, Surf. Sci. 162 (1985) 996–1002.

    Article  CAS  Google Scholar 

  15. B. Baretzky, W. Möller, E. Taglauer, Nucl. Instr. & Meth. B18 (1987) 496–500.

    CAS  Google Scholar 

  16. B. Baretzky, W. Möller, E. Taglauer, in preparation.

    Google Scholar 

  17. A.R. Krauss, O. Auciello, A. Uritani, M. Valentine, M. Mendelsohn, D.M. Gruen, Nucl. Instr. & Meth. _B27_ (1987) 209–220.

    Article  CAS  Google Scholar 

  18. M.H. Mendelsohn, D.M. Gruen, and A.R. Krauss, J. Nucl. Mater. 141–143 (1986) 184.

    Article  CAS  Google Scholar 

  19. G. Ertl, H. Küppers, Low Energy Electrons and Surface Chemistry, Verlag Chemie, 1974.

    Google Scholar 

  20. W. Möller and W. Eckstein, Nucl. Instr. & Meth. B2 (1984) 814; W. Möller, Nucl. Instr. & Meth. B15 (1986) 688.

    Google Scholar 

  21. J.P. Biersack and L.G. Haggmark, Nucl. Instr. & Meth. 174 (1980) 257.

    Article  CAS  Google Scholar 

  22. W. Möller, in: Materials Modification by High-Fluence Ion Beams (in this volume).

    Google Scholar 

  23. B. Baretzky, E. Taglauer, in preparation.

    Google Scholar 

  24. R. Schorn, private communication, in preparation.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-8046, Garching/München, Germany

    B. Baretzky

Authors
  1. B. Baretzky
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. IBM T.J. Watson Research Center, Yorktown Heights, NY, USA

    Roger Kelly

  2. Laboratório Nacional de Engenharia e Tecnologia Industrial, Sacavem, Portugal

    M. Fernanda da Silva

Rights and permissions

Reprints and permissions

Copyright information

© 1989 Kluwer Academic Publishers

About this chapter

Cite this chapter

Baretzky, B. (1989). Investigation of Preferential Sputtering Mechanisms by Analysing the Sample Surface and Near-Surface Region with AES and ISS. In: Kelly, R., da Silva, M.F. (eds) Materials Modification by High-fluence Ion Beams. NATO ASI Series, vol 155. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1267-0_24

Download citation

  • DOI: https://doi.org/10.1007/978-94-009-1267-0_24

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7063-8

  • Online ISBN: 978-94-009-1267-0

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation