Sims Analysis of SiC Coated and Uncoated Nicalon Fibers
Pyrolytic SiC deposits were performed on Nicalon 202 SiC fibers using either a static method designed for fiber structure infiltration or a dynamical method designed for fiber coating. A Carbon deposit was sometimes introduced between the fiber and the SiC matrix. The coated fibers were analysed by Secondary Ion Mass Spectrometry (SIMS). The depth profiles obtained show that (i) the fibers retain their composition after the process (static or dynamical), (ii) the deposits prepared using the static method exhibit an heterogeneity of microstructure and composition; these changes are due to a transitory stage at the beginning of the CVD reaction and (iii) the deposits prepared using the dynamical method exhibit a constant carbon content higher than the stoechiometric one (C/Si = 1.4).
KeywordsChemical Vapor Deposition Depth Profile Electron Energy Loss Spectroscopy Transitory Stage Chemical Vapor Deposition Process
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