Esprit ’89 pp 180-194 | Cite as

Software for Modelling Semiconductor Devices in Three Dimensions

  • C. Greenough
  • D. Gunasekera
  • P. A. Mawby
  • M. S. Towers
  • C. J. Fitzsimons
Conference paper

Abstract

In recent years three-dimensional modelling of semiconductor devices has become increasingly important due to the continued miniaturisation of devices. There has been a corresponding increase in the research devoted to developing three-dimensional numerical models of devices. Here we discuss some of the work in the ESPRIT project EVEREST relating to this. We describe in detail the software implementation of the algorithmic techniques being developed in the project.

Keywords

Semiconductor Device Mobility Model Impurity Profile Rutherford Appleton Laboratory MOSFET Device 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© ECSC, EEC, EAEC, Brussels and Luxembourg 1989

Authors and Affiliations

  • C. Greenough
    • 1
  • D. Gunasekera
    • 2
  • P. A. Mawby
    • 2
  • M. S. Towers
    • 2
  • C. J. Fitzsimons
    • 3
  1. 1.Rutherford Appleton LaboratoryChilton, DidcotUK
  2. 2.University College, SwanseaSwanseaUK
  3. 3.Numerical Analysis GroupTrinity College DublinDublin 2Ireland

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