Software for Modelling Semiconductor Devices in Three Dimensions
In recent years three-dimensional modelling of semiconductor devices has become increasingly important due to the continued miniaturisation of devices. There has been a corresponding increase in the research devoted to developing three-dimensional numerical models of devices. Here we discuss some of the work in the ESPRIT project EVEREST relating to this. We describe in detail the software implementation of the algorithmic techniques being developed in the project.
KeywordsSemiconductor Device Mobility Model Impurity Profile Rutherford Appleton Laboratory MOSFET Device
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