Growth of Ceramic Layers from Vapor Phase

  • F. Teyssandier
Part of the NATO ASI Series book series (NSSE, volume 173)

Abstract

Ceramics can be obtained by many techniques and mainly by powder processes such as sintering. They can also be grown from vapor phase with the Chemical Vapor Deposition (CVD) process. Numerous attempts have been made to obtain a better understanding of the mechanisms which involve complex fluid dynamics and surface phenomena but direct evidence is still lacking. Many reviews have dealt with this subject [1–5] and general trends used in the comprehension of the various steps leading to the formation of a ceramic from a gas phase are first presented. Recent developments of the process leading to more complex coatings such as ceramic composites are then discussed. The interest of the thermodynamic calculation used as a predictive tool is finally shown with a few examples dealing with two-phased materials or non-stoichiometric compounds.

Keywords

Chemical Vapor Deposition Chemical Vapor Deposition Process Partially Stabilize Zirconia Surface Kinetic Amorphous Si3N4 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic Publishers 1989

Authors and Affiliations

  • F. Teyssandier
    • 1
  1. 1.CNRS-Institut de Science et de Génie des Matériaux et ProcédésUP32 UniversitéPerpignanFrance

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