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Copper-Cordierite Cosintering

  • V. Oliver
  • J. Guille
  • J. C. Bernier
  • B. S. Han
  • J. Werckmann
  • J. Faerber
  • P. Humbert
  • B. Carriere
Part of the NATO ASI Series book series (NSSE, volume 173)

Abstract

The use of a sol-gel processed cordierite precursor sinterable about 900 °C allows cosintering of the copper and the ceramic. A strong bonding between the copper film and the cordierite substrate can be achieved through an eutectic bonding technique. Three types of interfaces have been studied by EPMA, ESCA and SEM: (a) cosintered in hydrogen, leading to poor metal adhesion, (b) cosintered in wet argon with slow heating rate (500°C/h) leading to strong copper diffusion, (c) cosintered in wet argon with fast heating rate (800°C/h) leading to the best macroscopic properties, i.e. no deformation, limited diffusion and strong adhesion.

Keywords

Depth Profile Copper Film Slow Heating Rate Microelectronic Packaging Fast Heating Rate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. J.C. BERNIER, P. POIX, J.L. REHSPRINGER, G. VILMIN and S. VILMINOT, French patent n ° 85–10873Google Scholar
  2. J.F. BURGESS et CA. NEWGEBAUER, US patent 3.911.553Google Scholar
  3. V. OLIVER-BROUDIC, Thesis, Strasbourg I, France (1988)Google Scholar
  4. B.S. HAN, Thesis, Strasbourg I, France (1988)Google Scholar
  5. OLIVER-BROUDIC, J. GUILLE, J.C. BERNIER, B.S. HAN, J. WERCKMANN, J. FAERBER, P. HUMBERT and B. CARRIERE, J. Mater. Sc. Eng., in pressGoogle Scholar

Copyright information

© Kluwer Academic Publishers 1989

Authors and Affiliations

  • V. Oliver
    • 1
  • J. Guille
    • 1
  • J. C. Bernier
    • 1
  • B. S. Han
    • 2
  • J. Werckmann
    • 2
  • J. Faerber
    • 2
  • P. Humbert
    • 2
  • B. Carriere
    • 2
  1. 1.Groupe de Chimie des Matériaux InorganiquesI.P.C.M.S., E.H.I.C.S.StrasbourgFrance
  2. 2.I.P.C.M.S., Groupe Surfaces-InterfacesUniversité Louis PasteurStrasbourgFrance

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