Application of Ternary Phase Diagrams to GaAs-Metal Contacts

  • Rainer Schmid-Fetzer
Part of the NATO ASI Series book series (ASIC, volume 286)


The usefulness of consistent phase diagram and thermodynamic data as a powerful tool for the development of improved contact materials to compound semiconductors like GaAs is demonstrated. Predictive calculations of ternary Ga-As-M phase diagrams in the solid state using simplifications have been performed as a basis for future work. A simple scheme for representation of thermodynamic driving forces of possible reactions between the various phases is given. The phase diagrams are classified into four different possible types and examples are given for the three types which presumably exist for the metals studied.


Phase Diagram Interface Reaction Isothermal Section Diffusion Path Ternary Phase Diagram 
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Copyright information

© Kluwer Academic Publishers 1989

Authors and Affiliations

  • Rainer Schmid-Fetzer
    • 1
  1. 1.Metallurgical CenterTechnical University ClausthalClausthal-ZellerfeldWest Germany

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