Abstract
The effect of constant (axial and transverse) magnetic field on the Czochralski semiconductor single crystal growth is studied. Relationship between the changed melt dynamics and the distribution of dopants and contaminants is considered. It is found that a combination of the MHD- and conventional growth control means enables a purposeful change of the semiconductor single crystal characteristics.
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© 1989 Kluwer Academic Publishers
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Bochkarev, E.P. et al. (1989). The Effect of Electromagnetic Field on Semiconductor Single Crystal Growth and Characteristics. In: Lielpeteris, J., Moreau, R. (eds) Liquid Metal Magnetohydrodynamics. Mechanics of Fluids and Transport Processes, vol 10. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-0999-1_17
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DOI: https://doi.org/10.1007/978-94-009-0999-1_17
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6939-7
Online ISBN: 978-94-009-0999-1
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