Thin Film and Near Surface Characterization Using Indentation Systems
In recent years, thin films and ion implanted layers have been the focus of much research. Such surface layers are used for a variety of applications in industry. For example, thin metallic films are used for electrical contacts and for diffusion barriers in the semiconductor industry. Thin ceramic films are used as optical coatings for light emitting diodes and for optical windows. Thin films are also used to enhance wear resistance, and to provide corrosion protection and lubrication. Ion implanted layers are created in both metals and ceramics to enhance the toughness and wear resistance of such things as medical implants and optical materials. Such layers can also provide corrosion resistance and lubrication.
KeywordsSapphire Substrate Crystalline Layer Thin Metallic Film Indenter Displacement Constant Displacement Rate
Unable to display preview. Download preview PDF.
- 2.Pethica JB, R Hutchings, WC Oliver: Phil. Mag. A 48 (4) (1983) 593.Google Scholar
- 4.Newey D, HM Pollock, MA Wilkins: Ion Implantation into Metals. New York: Pergamon Press, 1982, 157.Google Scholar
- 6.Oliver, WC, CJ McHargue, GC Farlow, CW White: Defect Properties and Processing of High-Technology Non-Metallic Materials. Y Chen, WD Kingery, RJ Stokes (eds). Pittsburgh: Materials Research Society, 1986, 515.Google Scholar
- 8.Pethica, JB, P Koidl, J Gobrecht, C. Schiiler: J. Vac. Sci. Technol. A 3 (6) (1985) 2391.Google Scholar
- Metals Handbook, 8th ed.(1) Cleveland: American Society for Metals, 1961, 1201.Google Scholar
- 10.McHargue CJ, MB Lewis, BR Appleton, H Naramoto, CW White, JM Williams: Science of Hard Materials. RK Viswanadham, DJ Rowcliffe, J Gurland (eds). New York: Plenum Publishing Co., 1983, 451.Google Scholar
- 11.McHargue CJ, CW White, BR Appleton, GC Farlow, JM Williams: Ion Implantation and Ion Beam Processing of Materials. GK Hubler, OW Holland, CR Clayton, CW White (eds). Amsterdam: North-Holland, 1984, 385.Google Scholar
- 13.Burnett PJ, TF Page: Plasticity of Ceramic Materials. RC Bradt, RE Tressler (eds). New York: Plenum Publishing Co., 1984, 669.Google Scholar
- 14.McHargue CJ: Ion Beam Modification of Insulators. P Mazzoldi, G Arnold (eds). Amsterdam: Elsevier Science Publishers, 1987, 223.Google Scholar