Abstract
Ion beam mixing effects in metal/insulator systems have been investigated for a few metal/Si02 couples irradiated with different ions, with particular attention to mixing mechanisms (1–3). Because of applications of ion mixing to metal/insulator couples, most interest was devoted to modifications of the interfacial region, which may lead to film adhesion improvements useful for microelectronic device fabrication (4,5). In a recent paper (6) we presented some results on modifications of optical properties in ion beam mixed Fe/Si02 samples, which could be relevant for applications in optoelectronic devices. In this paper we focus our attention both on mixing mechanisms and on the microstructural and optical properties of the interfacial region of the Kr irradiated Fe/Si02system before and after thermal annealings for 5 h at 500 and 700°C.
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© 1989 Kluwer Academic Publishers
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Battaglin, G., Lo Russo, S., Paccagnella, A., Polato, P., Principa, G. (1989). Ion Beam Mixing of Fe in Si02: Structural and Optical Properties. In: McHargue, C.J., Kossowsky, R., Hofer, W.O. (eds) Structure-Property Relationships in Surface-Modified Ceramics. NATO ASI Series, vol 170. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-0983-0_11
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DOI: https://doi.org/10.1007/978-94-009-0983-0_11
Publisher Name: Springer, Dordrecht
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