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Process Simulation

  • W. Fichtner
Chapter
Part of the NATO ASI Series book series (NSSE, volume 164)

Abstract

The use of computer aided design tools has proven to be invaluable in the development of new technologies and in integrated circuit (IC) design. A modern IC process contains several hundred individual steps. Computer simulations have emerged as a very elegant way to aid process and device engineer in their task of finding an optimum process.

Keywords

Monte Carlo Modulation Transfer Function Transverse Electric Electrochemical Society Boltzmann Transport Equation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic Publishers 1989

Authors and Affiliations

  • W. Fichtner
    • 1
  1. 1.Institute for Integrated SystemsSwiss Federal Institute of TechnologyZurichSwitzerland

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