Structural, Electrical and Optical Characterization of Sputtered ZnOx Thin Film
As Zinc oxide films have many available characteristics, a large number of crystallographic studies have been reported on the films deposited by sputtering. However, most of those are about the influence of deposition conditions for (002) (c-axis) oriented films(l)–(2). The growing process of ZnOx films has not been necessarily manifested.
KeywordsSubstrate Temperature Prefer Orientation Increase Annealing Temperature Osaka Prefecture Indium Antimonide
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