Ferroelectric Thin Films from Metallo-organics: The Influence of Different Atmospheres during RTA Processing
Barium Titanate (BaTiO3) films have been deposited on platinum via spin-casting metallo-organic compounds and rapid thermal annealing (RTA). This method, called metallo-organic decomposition (MOD), produces tetragonal BaTiO3 films with easily controllable stoichiometry as determined by x-ray diffraction (XRD) and Auger electron spectroscopy (AES). The precursors used were barium neodecanoate and titanium dimethoxy dineodecanoate. The film precursor is obtained by mixing the individual precursors in a nearly 1∶1 molar ratio before processing. Variable thickness (0.1–3 µm) is achieved by spin-casting multiple layers of the films. The films were RTA processed to 650° for 30s or to 950° for 15s under controlled atmosphere (O2, Ar, and partial vacuum). The films processed under O2 showed better stoichiometry and purity than the ones processed under partial vacuum (10−3 Torr) as evidenced by XRD and AES. The carbon contamination from pyrolysis residues, prevalent in the partial vacuum processed films, fell below the instrument detection limit for the O2 and Ar processed films. All the films are uniform and crack-free as shown in the scanning electron micrograph (SEM). Average grain size determined by SEM ranged from 0.01 µm to 0.5 µm, depending on the annealing condition.
KeywordsScanning Electron Micrograph Auger Electron Spectroscopy Rapid Thermal Annealing Barium Titanate Ferroelectric Thin Film
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