• George E. Anner


A polished, monocrystalline silicon wafer is the starting material for solid state devices produced by silicon planar processing. In this chapter we consider four main topics concerning these wafers: (1) Why are they monocrystalline? (2) What are their crystalline properties? (3) How is their electrical resistivity related to doping? (4) How are wafers prepared from the raw source material of sand? In the next section we consider the crystal structure of silicon, the properties of its principal planes, and the reasons why certain of the planes are chosen for wafer faces.


Silicon Wafer Wafer Surface Miller Index Bulk Resistivity Principal Plane 
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Copyright information

© Van Nostrand Reinhold 1990

Authors and Affiliations

  • George E. Anner
    • 1
  1. 1.University of IllinoisChampaign-UrbanaUSA

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