Bandgap Engineering of 3-D Photonic Crystals Operating at Optical Wavelengths
We describe the fabrication of three-dimensional photonic crystals with bandgaps lying in the near infrared region of the electromagnetic spectrum. By fabricating these nano-structures using a reproducible and reliable procedure consisting of electron beam lithography followed by dry etching, we have produced up to four-layer deep photonic crystals. The spectral response of these devices was tuned by lithographically controlling their spatial periodicities. In the present work, we discuss the elaborate processing steps used to synthesize these three-dimensional dielectric structures and analyze their transmission spectra in comparison with a macro-machined microwave model.
KeywordsPhotonic Crystal Etch Rate Electron Beam Lithography Triangular Array Microwave Spectrum
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