Pulsed Laser Deposition of Nb5Te4 Thin Films

Ablation Plume Analyses
  • F. Grangeon
  • H. Sassol
  • L. Lambert
  • Y. Mathey
  • M. Autric
  • W. Marine
Part of the NATO ASI Series book series (NSSE, volume 307)

Abstract

Niobium telluride thin films were produced by excimer laser vaporisation of NbTe2 bulk targets and deposition of the ablation plume on heated silicon substrates. Precise control of the laser energy density and of the substrate temperature leads to good quality, well-crystallized thin films. For a specific couple of fluence and temperature, films were crystallized in the Nb5Te4 phase. In order to characterize the influence of laser parameters, analyse of the ablation plume by optical spectroscopy was performed using an Optical Multichanel Analyzer.

Keywords

Substrate Temperature Spectral Line Pulse Laser Deposition Laser Energy Density Ablation Plume 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic Publishers 1996

Authors and Affiliations

  • F. Grangeon
    • 1
  • H. Sassol
    • 2
  • L. Lambert
    • 1
  • Y. Mathey
    • 2
  • M. Autric
    • 1
  • W. Marine
    • 2
  1. 1.Laboratoire Interdisciplinaire Ablation Laser et applicationsUM. 34 C.N.R.S. Institut de Mécanique des Fluides (case 918)MarseilleFrance
  2. 2.URA CN.R.S. 783 Departement de Physique (case 901)Parc Scientifique et Technologique de LuminyMarseilleFrance

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