Pulsed Laser Deposition of Nb5Te4 Thin Films
Niobium telluride thin films were produced by excimer laser vaporisation of NbTe2 bulk targets and deposition of the ablation plume on heated silicon substrates. Precise control of the laser energy density and of the substrate temperature leads to good quality, well-crystallized thin films. For a specific couple of fluence and temperature, films were crystallized in the Nb5Te4 phase. In order to characterize the influence of laser parameters, analyse of the ablation plume by optical spectroscopy was performed using an Optical Multichanel Analyzer.
KeywordsSubstrate Temperature Spectral Line Pulse Laser Deposition Laser Energy Density Ablation Plume
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- 3.Balchin, A.A. (1976) Crystallography and chemistry of materials with layered structure Ed. F. Levy, Reidel, DordrechtGoogle Scholar
- 4.Meerschaut, A. and Rouxel, J. (1986) Crystal structure and properties of materials with a quasi-onedimensional structure Ed. J. Rouxel, Reidel, DordrechtGoogle Scholar
- 7.Honig, R.E. and Kramer, D.A. (1969) Vapor pressure data for the solid and liquid elements, RCA Review 285Google Scholar
- 8.Geohegan, D.B. (1994) AIP Conference proceeding, 288, COLA 93, Ed. J.C. Miller and D.B. Geohegan, AIP Press, N.Y.Google Scholar
- 9.Handbook of chemistry and physics, 62nd edition, Ed. R.C. Weast and M.J. Astle, CRC Press, Boca Raton, Florida, E-300Google Scholar
- 10.Handbook of chemistry and physics, 62nd edition, Ed. R.C. Weast and M.J. Astle, CRC Press, Boca Raton, Florida, E-65Google Scholar
- 11.Singh, R.K. and Narayan, J. (1990) Physical Review B 41 8843Google Scholar