Advertisement

Direct Synthesis of Metal Nitride by Laser

  • C. Boulmer-Leborgne
  • A. L. Thomann
  • J. Hermann
Part of the NATO ASI Series book series (NSSE, volume 307)

Abstract

In this work titanium nitride synthesis is carried out by direct laser irradiation at Ti sample surface in presence of ambient nitrogen. The experimental procedure is performed in a chamber allowing plasma study by emission spectroscopy. Two pulsed laser types are used, a TEA-CO2 (10 600nm) and a XeCl excimer (308nm) in order to compare the laser-material coupling influence on the layer synthesis process depending on the laser wavelength. In both cases the titanium nitride synthesis is evidenced.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Geerstsen C., Briand A., Chartier F., Lacour J.L, Mauchien P., Sjöström S. and Mermet J.M. (1994) Comparison between infrared and ultraviolet laser ablation at atmospheric pressure, Journal of analytical atomic spectrometry 9,17–22CrossRefGoogle Scholar
  2. 2.
    Richter A (1190) Characteristic features of laser-produced plasmas for thin film deposition, Thin Solid Films 188, 275–292CrossRefGoogle Scholar
  3. 3.
    Hermann J, Boulmer-Leborgne C., Mihailescu I.N. and Dubreuil B. (1993) Multistage plasma initiation process by pulsed C02 laser irradiation of a Ti sample in an ambient gas, Journal of Applied Physics 73 (1) 1091–1099ADSCrossRefGoogle Scholar
  4. 4.
    Hermann J., Boulmer-Leborgne C., Dubreuil B. and Mihailescu I.N.(1993) Influence of irradiation conditions on plasma evolution in laser-surface interaction, Journal of Applied Physics 74(5), 3071–3079ADSCrossRefGoogle Scholar
  5. 5.
    Hermann J., Boulmer-Leborgne C., Dubreuil B. and Mihailescu I.N. (1992) Investigation by laser-induced fluorescence of surface vaporization during the pulsed C02 laser irradiation of a titanium sample in an ambient gas, Journal of Applied Physics 71(11), 5629–5634ADSCrossRefGoogle Scholar

Copyright information

© Kluwer Academic Publishers 1996

Authors and Affiliations

  • C. Boulmer-Leborgne
    • 1
  • A. L. Thomann
    • 1
  • J. Hermann
    • 1
  1. 1.GREMIUniversité d’OrléansOrleans Cedex2France

Personalised recommendations