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Diamond-Like Carbon Films Obtained by Ion-Plasma Magnetron Sputtering

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Future Information Communication Technology and Applications

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 235))

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Abstract

By ion-plasma magnetron sputtering obtained diamond-like carbon films. Determined phase composition, surface morphology, measured the thickness of the films.

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References

  1. Sarsembinov Sh, Prikhodko O, Maximova SJ (2005) Physical basis modification of the electronic properties of non-crystalline semiconductors. Almaty, pp 253–298

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Author information

Authors and Affiliations

  1. Department of Physics and Techniques, Al-Farabi Kazakh National University, Almaty, Kazakhstan

    M. J. Buranbaev, B. A. Aliyev, O. E. Kaipoldayev, J. A. Entibekov & R. K. Aliaskarov

Authors
  1. M. J. Buranbaev
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  2. B. A. Aliyev
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  3. O. E. Kaipoldayev
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  4. J. A. Entibekov
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  5. R. K. Aliaskarov
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Corresponding author

Correspondence to O. E. Kaipoldayev .

Editor information

Editors and Affiliations

  1. , Computer Engineering, Paichai University, Baejae-ro, Seo-gu 155-40, Daejeon, 302-735, Korea, Republic of (South Korea)

    Hoe-Kyung Jung

  2. , Electronic Engineering, Mokwon University, Doanbookro, Seo-Ku 88, Daejeon, 302-729, Korea, Republic of (South Korea)

    Jung Tae Kim

  3. PO Box 2434, Electrical Engineering, QUT Gardens Point, George Street 2, Brisbane, 4001, Queensland, Australia

    Tony Sahama

  4. Normal University, Graduate Institute of Information, National Kaohsiung, No.116, Heping 1st Rd., Lingya District, Kaohsiung City, 80201, Kao-hsiung, Taiwan R.O.C.

    Chung-Huang Yang

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Buranbaev, M.J., Aliyev, B.A., Kaipoldayev, O.E., Entibekov, J.A., Aliaskarov, R.K. (2013). Diamond-Like Carbon Films Obtained by Ion-Plasma Magnetron Sputtering. In: Jung, HK., Kim, J., Sahama, T., Yang, CH. (eds) Future Information Communication Technology and Applications. Lecture Notes in Electrical Engineering, vol 235. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6516-0_113

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  • DOI: https://doi.org/10.1007/978-94-007-6516-0_113

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-007-6515-3

  • Online ISBN: 978-94-007-6516-0

  • eBook Packages: EngineeringEngineering (R0)

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