Diamond-Like Carbon Films Obtained by Ion-Plasma Magnetron Sputtering

  • M. J. Buranbaev
  • B. A. Aliyev
  • O. E. Kaipoldayev
  • J. A. Entibekov
  • R. K. Aliaskarov
Chapter
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 235)

Abstract

By ion-plasma magnetron sputtering obtained diamond-like carbon films. Determined phase composition, surface morphology, measured the thickness of the films.

Keywords

Diamond-like carbon Carbon films Ion-plasma sputtering Magnetron sputtering 

References

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    Semenov AP, Belyanin AF, Semenov IA, Pashenko V, Barankov YA (2004) Thin films of carbon. Structure and properties. J Appl SciGoogle Scholar
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    Raiko VR (1996) Diam Relat Mater 10:1063Google Scholar
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Copyright information

© Springer Science+Business Media Dordrecht 2013

Authors and Affiliations

  • M. J. Buranbaev
    • 1
  • B. A. Aliyev
    • 1
  • O. E. Kaipoldayev
    • 1
  • J. A. Entibekov
    • 1
  • R. K. Aliaskarov
    • 1
  1. 1.Department of Physics and TechniquesAl-Farabi Kazakh National UniversityAlmatyKazakhstan

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