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Applications in Automated Microscopy

  • Richard Doornbos
  • Sjir van Loo
Chapter
Part of the SpringerBriefs in Electrical and Computer Engineering book series (BRIEFSELECTRIC)

Abstract

Automation of measurements and automatic analysis of samples on a transmission electron microscope enables a large variety of new microscopy applications suited for industrial needs. The consequences of these new possibilities are profound. The current methods for performing measurements and analysis should be considered carefully in order to find the optimal procedures and conditions needed to deliver the required accuracy or throughput. This chapter shows how to design an automated microscopy application using a model-based approach for one specific application, viz. the size analysis of a mixture of particles.

Keywords

Microscopy application Particle sizing Particle detection Experiment design 

Notes

Acknowledgments

The author likes to acknowledge Max Otten from FEI for sharing his experience in probe formation.

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Copyright information

© The Author(s) 2012

Authors and Affiliations

  1. 1.Research FellowEmbedded Systems InstituteEindhovenThe Netherlands
  2. 2.Senior Research FellowEmbedded Systems InstituteEindhovenThe Netherlands

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