On Binary Topology Design of Electro-Thermally-Compliant MEMS

  • Pranay SharmaEmail author
  • Anupam Saxena
Conference paper
Part of the Mechanisms and Machine Science book series (Mechan. Machine Science, volume 2)


We demonstrate a method for topology design of Electro- Thermally- Compliant Micro- Electro- Mechanical Systems (MEMS). The method ensures well connected perfectly binary solutions for which only nominal post processing is needed. The Adaptive Material Mask Overlay (AMOM) topology design algorithm is stochastic and is based on the very principle used to fabricate micro- devices and IC circuits. The method employs negative circular masks that act as local material sinks. The center coordinates, radii and the number of masks are all systematically determined to obtain the final topologies for a given computational effort. Three examples, presented elsewhere, are re- solved using the proposed scheme and the solutions are compared with those obtained using the classical gradient based methods. The proposed method shows promise in yielding multiple and large deformation solutions.


MEMS AMOM Topology design ETC micro mechanisms 


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Copyright information

© Springer Science+Business Media B.V. 2012

Authors and Affiliations

  1. 1.Indian Institute of TechnologyKanpurIndia

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