Abstract
Ultrasonic hot embossing allows the fabrication of micro structures from polymer films by moulding from a master tool. The fabrication process is completed within seconds and the investment costs are low. With micro patterned tools, structured surfaces can be created on one or both sides of polymer films. For micro whistles and micro fluidic devices such as micro mixers or flow sensors, sealed structures are created by welding a cover film on embossed structures. Furthermore, moulded interconnection devices can be fabricated by welding polymer coated metal films onto polymers.
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References
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© 2012 Springer Science+Business Media B.V.
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Burlage, K., Gerhardy, C., Schomburg, W. (2012). Ultrasonic Hot Embossing and Welding of Micro Structures. In: Ananthasuresh, G., Corves, B., Petuya, V. (eds) Micromechanics and Microactuators. Mechanisms and Machine Science, vol 2. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-2721-2_11
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DOI: https://doi.org/10.1007/978-94-007-2721-2_11
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