Abstract
This paper investigates the sensitivity of the third order nonlinearity cancelation to the mixed (hardening and softening) behavior in electrostatically actuated micromechanical resonators under primary resonance at large amplitudes compared to the gap. We demonstrate the dominance of the mixed behavior due to the quintic nonlinearities, beyond the critical amplitude when the third order mechanical and electrostatic nonlinearities are balanced. We also report the experimental observation of a strange attraction which can lead to a chaotic resonator.
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References
Rugar, D., Budakian, R., Mamin, H.J., Chui, B.W.: Single spin detection by magnetic resonance force microscopy. Nature 430, 329 (2004)
Jensen, K., Kim, K., Zettl, A.: An atomic-resolution nanomechanical mass sensor. Nat. Nano. 3, 533 (2008)
Kaajakari, V., Koskinen, J.K., and Mattila, T.: Phase noise in capacitively coupled micromechanical oscillators. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52, 2322 (2005)
Kozinsky, I., Postma, H.W.Ch., Bargatin, I., Roukes, M.L: Tuning nonlinearity, dynamic range, and frequency of nanomechanical resonators. Appl. Phys. Lett. 88, 253101 (2006)
Shao, L.C., Palaniapan, M., Tan, W.W.: The nonlinearity cancellation phenomenon in micromechanical resonators. J. Micromech. Microeng. 18, 065014 (2008)
Kacem, N., Hentz, S., Pinto, D., Reig, B., Nguyen, V.: Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors. Nanotechnology 20, 275501 (2009)
Kacem, N., Baguet, S., Hentz, S., Dufour, R.: Computational and quasi-analytical models for non-linear vibrations of resonant MEMS and NEMS sensors. Int. J. Non Linear Mech. 46, 532 (2011)
Kacem, N., Arcamone, J., Perez-Murano, F., Hentz S.: Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications. J. Micromech. Microeng. 20, 045023 (2010)
Kacem, N., Hentz S.: Bifurcation topology tuning of a mixed behavior in nonlinear micromechanical resonators. Appl. Phys. Lett. 95, 183104 (2009)
Acknowledgements
The authors gratefully acknowledge financial support from the CEA LETI and I@L Carnot institutes (NEMS Project) and from the MNTEurop Project.
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Kacem, N., Hentz, S., Baguet, S., Dufour, R. (2011). High Order Nonlinearities and Mixed Behavior in Micromechanical Resonators. In: Náprstek, J., Horáček, J., Okrouhlík, M., Marvalová, B., Verhulst, F., Sawicki, J. (eds) Vibration Problems ICOVP 2011. Springer Proceedings in Physics, vol 139. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-2069-5_23
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DOI: https://doi.org/10.1007/978-94-007-2069-5_23
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