2D Anemometer Based on Multichannel Single Chip Flow Sensor
A compact 2D wind sensor made up of an integrated, single chip, double channel flow sensor and a PMMA cylinder is proposed. The flow sensor is a standard micro calorimeter designed with a commercial CMOS process and thermally insulated from the substrate by means of a post-processing technique. The cylinder has two orthogonal active sections with an original channel configuration that connects the outer surface of the cylinder surface to the flow sensor. The optimization of the channel configuration allows to obtain a cosine dependence of the measured flow on the wind direction.
KeywordsChannel Structure Angular Error Flow Sensor Channel Configuration Calculated Flow Rate
The authors wish to thank the STMicroelectronics of Cornaredo (Italy) for fabricating the chips.
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