2D Anemometer Based on Multichannel Single Chip Flow Sensor

  • M. Piotto
  • P. Bruschi
  • F. Butti
  • G. Pennelli
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 91)


A compact 2D wind sensor made up of an integrated, single chip, double channel flow sensor and a PMMA cylinder is proposed. The flow sensor is a standard micro calorimeter designed with a commercial CMOS process and thermally insulated from the substrate by means of a post-processing technique. The cylinder has two orthogonal active sections with an original channel configuration that connects the outer surface of the cylinder surface to the flow sensor. The optimization of the channel configuration allows to obtain a cosine dependence of the measured flow on the wind direction.


Channel Structure Angular Error Flow Sensor Channel Configuration Calculated Flow Rate 
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The authors wish to thank the STMicroelectronics of Cornaredo (Italy) for fabricating the chips.


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Copyright information

© Springer Science+Business Media B.V. 2011

Authors and Affiliations

  1. 1.IEIIT—Pisa, CNRPisaItaly
  2. 2.Dipartimento di Ingegneria dell’InformazionePisaItaly

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