Liquid-Flow Measurements in Silicon Dioxide Channels with Micron-Sized Dimension
Flow measurements on silicon dioxide microchannels featuring inner cross-section as low as 16 ?m2 and aspect-ratio as high as 50 have been performed using liquids with different dynamic viscosities. The microchannels, arranged in a square array with density of 1 × 106 channel/cm2, are embedded into a silicon substrate and connected to a reservoir grooved on the backside of the substrate. Flow measurements were performed by using an original, purposely designed system. In this work, details on both the measurement systems and the flow properties of such a small channels are reported and discussed.
KeywordsHollow Silicon Dioxide Microchannel Array Silicon Dioxide Channel Macropore Array Constant Differential Pressure
This work was supported by Fondazione Cassa di Risparmio di Pisa, Pisa, Italy in the frame of the Project “Microsistema integrato per l’iniezione sottocutanea controllata di piccole quantità di medicinali” (“Integrated microsystem for the controlled delivery of small drug quantities”).
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