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Liquid-Flow Measurements in Silicon Dioxide Channels with Micron-Sized Dimension

  • G. Barillaro
  • A. Diligenti
  • L. M. Strambini
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 91)

Abstract

Flow measurements on silicon dioxide microchannels featuring inner cross-section as low as 16 ?m2 and aspect-ratio as high as 50 have been performed using liquids with different dynamic viscosities. The microchannels, arranged in a square array with density of 1 × 106 channel/cm2, are embedded into a silicon substrate and connected to a reservoir grooved on the backside of the substrate. Flow measurements were performed by using an original, purposely designed system. In this work, details on both the measurement systems and the flow properties of such a small channels are reported and discussed.

Keywords

Hollow Silicon Dioxide Microchannel Array Silicon Dioxide Channel Macropore Array Constant Differential Pressure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

This work was supported by Fondazione Cassa di Risparmio di Pisa, Pisa, Italy in the frame of the Project “Microsistema integrato per l’iniezione sottocutanea controllata di piccole quantità di medicinali” (“Integrated microsystem for the controlled delivery of small drug quantities”).

References

  1. 1.
    Jiang XN, Zhou ZY, Huang XY, Liu CY (1997) Laminar flow through microchannels used for microscale cooling systems. In: Proceedings of the electronic packaging technology conference, EPTC, pp 119–122Google Scholar
  2. 2.
    Mala GhM, Li D (1999) Flow characteristics of water in microtubes. Int J Heat Fluid Flow 20:142–148CrossRefGoogle Scholar
  3. 3.
    Park H, Pak JJ, Son SY, Lim G, Song I (2003) Fabrication of a microchannel integrated with inner sensors and the analysis of its laminar flow characteristics. Sens Actuators A 103:317–329CrossRefGoogle Scholar
  4. 4.
    Steinke ME, Kandlikar SG (2006) Single-phase liquid friction factors in microchannels. Int J Thermal Sci 45:1073–1083CrossRefGoogle Scholar
  5. 5.
    Lehmann V (1993) The physics of macropore formation in low doped n-type silicon. J Electrochem Soc 140:2836–2843CrossRefGoogle Scholar
  6. 6.
    Lehmann V, Gruning U (1997) The limits of macropore array fabrication. Thin Solid Films 297:13–17CrossRefGoogle Scholar
  7. 7.
    Barillaro G, Nannini A, Piotto M (2002) Electrochemical etching in HF solution for silicon micromachining. Sens Actuators A 102:195–201CrossRefGoogle Scholar
  8. 8.
    Barillaro G, Bruschi P, Diligenti A, Nannini A (2005) Fabrication of regular silicon microstructures by photo-electrochemical etching of silicon. Phys Stat Sol (c) 2:3198–3202CrossRefGoogle Scholar
  9. 9.
    Comesaa JF, Otero JJ, Garcia E, Correa A (2003) Densities and viscosities of ternary systems of water + glucose + sodium chloride at several temperatures. J Chem Eng Data 48:362–366CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media B.V. 2011

Authors and Affiliations

  1. 1.Dipartimento di Ingegneria dell’Informazione: Elettronica, Informatica, TelecomunicazioniUniversità di PisaPisaItaly

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