Advertisement

Silicon Carbide Schottky Diodes for Alpha Particle Detection

  • M. Piotto
  • P. Bruschi
  • A. Diligenti
  • R. Ciolini
  • G. Curzio
  • A. Di Fulvio
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 91)

Abstract

The fabrication and characterization of SiC Schottky diodes for the detection of alpha particles at room temperature are described. A 5 × 5 matrix of diodes has been fabricated in order to verify the dependence of the device response on randomly distributed wafer defects. A dedicated exposure apparatus has been fabricated to test the detectors. Some preliminary alpha energy spectra obtained with the lowest reverse current diodes are shown.

Keywords

Alpha Particle Schottky Contact Alpha Energy Diode Characteristic Stencil Mask 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    Saddow SE, Agarwal A (2004) Advances in silicon carbide processing and applications. Artech House, Norwood, Massachusetts, USAGoogle Scholar
  2. 2.
    Wright NG, Horsfall AB (2007) SiC sensors: a review. J Phys D Appl Phys 40:6345–6354CrossRefGoogle Scholar
  3. 3.
    Ruddy FH, Dulloo AR, Seidel JG, Seshadri S, Rowland LB (1998) Development of a silicon carbide radiation detector. IEEE Trans Nucl Sci 45:536–541CrossRefGoogle Scholar
  4. 4.
    Nava F, Vanni P, Bruzzi M, Lagomarsino S, Sciortino S, Wagner G, Lanzieri C (2004) Minimum ionizing and alpha particles detectors based on epitaxial semiconductor silicon carbide. IEEE Trans Nucl Sci 51:238–244CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media B.V. 2011

Authors and Affiliations

  • M. Piotto
    • 1
  • P. Bruschi
    • 2
  • A. Diligenti
    • 2
  • R. Ciolini
    • 3
  • G. Curzio
    • 3
  • A. Di Fulvio
    • 3
  1. 1.IEIIT – PisaCNRPisaItaly
  2. 2.Dipartimento di Ingegneria dell’InformazioneUniversità di PisaPisaItaly
  3. 3.Dipartimento di Ingegneria Meccanica, Nucleare e della ProduzioneUniversità di PisaPisaItaly

Personalised recommendations