Smart Multichannel Flow Sensor with Temperature and Pressure Compensation

  • P. Bruschi
  • M. Dei
  • F. Butti
  • M. Piotto
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 91)


A compact sensor for measuring multiple gas flows has been designed and fabricated. The device consists in a single silicon chip where three independent flow sensing structures have been included. The sensing structures are differential micro-calorimeters, equipped with double heaters in order to perform drift-free offset compensation. The chip includes also a versatile electronic interface including a low noise chopper amplifier and an original closed loop heater driver capable of reducing the effects of pressure variations on the flow measurement. The chip has been designed using the BCD6s process of STMicroelectronics. A post-processing step, based on anisotropic etching, is required to complete the smart sensor fabrication.


Microfluidic Device Electronic Interface Anisotropic Etching Smart Sensor Common Mode Voltage 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The authors would like to thank the R&D group of the STMicroelectronics of Cornaredo (MI, Italy) for fabrication of the chips described in this work.


  1. 1.
    Shin WC, Besser RS (2006) A micromachined thin-film gas flowsensor for microchemical reactors. J Micromech Microeng 16:731–741CrossRefGoogle Scholar
  2. 2.
    Matticari G, Noci GE, Siciliano P, Colangelo G, Schmidt R (2006) Cold gas micro propulsion prototype for very fine spacecraft attitude/position control. In: Proceedings of AIAA/ASME/SAE/ASEE 42nd joint propulsion conference, Sacramento, USA, pp 5378–5390, JulyGoogle Scholar
  3. 3.
    Bruschi P, Dei M, Piotto M (2009) Offset compensation of integrated thermal flow sensors by means of split heater microstructures. In: Proceedings of DTIP 09, Rome, Italy, pp 433–436, AprilGoogle Scholar
  4. 4.
    Bruschi P, Piotto M, Bacci N (2009) Postprocessing, readout and packaging methods for integrated gas flow sensors. Microelectron J 40:1300–1307CrossRefGoogle Scholar
  5. 5.
    Bruschi P, Dei M, Piotto M (2009) A single chip, double channel thermal flow meter. Microsyst Technol 15:1179–1186CrossRefGoogle Scholar
  6. 6.
    Bruschi P, Piotto M, Barillaro G (2006) Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors. Sens Actuators A 131:182–187CrossRefGoogle Scholar
  7. 7.
    Bruschi P, Dei M, Piotto M (2011) A method to compensate the pressure sensitivity of integrated thermal flow sensors. IEEE Sens J 11:1162–1168CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media B.V. 2011

Authors and Affiliations

  1. 1.Dipartimento di Ingegneria dell’InformazionePisaItaly
  2. 2.IEIIT – PisaCNRPisaItaly

Personalised recommendations