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Recent Advances in Microelectromechanical Systems and Their Applications for Future Challenges

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Recent Advances in Mechanics

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Abstract

Recent advances in optoelectronic methodology for microscale measurements are described and their use is illustrated with representative examples of microelectromechanical systems (MEMS) operating at high frequencies and used in demanding environments. Today, the word MEMS is employed to describe a process used as well as the resulting products. Therefore, a MEMS-process is also known as a “microsystem technology” (MST).

Advances in emerging technologies (ETs) of MEMS and nanotechnology, especially relating to the applications, constitute one of the most challenging tasks in today’s micromechanics and nanomechanics. In addition to design, analysis, and fabrication capabilities, these tasks also require advanced test methodologies for determination of functional characteristics of devices produced to enable verification of their operation as well as refinement and optimization of specific designs. In particular, development of miniscule devices requires sophisticated design, analysis, fabrication, testing, and characterization tools. These tools can be categorized as analytical, computational, and experimental. Solutions using the tools from any one category alone do not usually provide necessary information on MEMS and extensive merging, or hybridization, of the tools from different categories is used. One of the approaches employed in this development of structures of contemporary interest, is based on a combined use of the analytical, computational, and experimental solutions (ACES) methodology. Development of this methodology was made possible by recent advances in optoelectronic methodology, which was coupled with the state-of-the-art computational methods, to offer a considerable promise for effective development of various designs. This approach facilitates characterization of dynamic and thermomechanical behavior of the individual components, their packages, and other complex material structures. In this paper, recent advances in optoelectronic methodology for micro- and nano-scale measurements are described and their use is illustrated with representative examples.

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Author information

Authors and Affiliations

  1. NEST – NanoEngineering, Science, and Technology, Worcester Polytechnic Institute, Worcester, MA, 01609, USA

    Ryszard J. Pryputniewicz

  2. CHSLT – Center for Holographic Studies and Laser micro-mechaTronics, Worcester Polytechnic Institute, Worcester, MA, 01609, USA

    Ryszard J. Pryputniewicz

  3. Mechanical Engineering Department, Worcester Polytechnic Institute, Worcester, MA, 01609, USA

    Ryszard J. Pryputniewicz

  4. Professor of Electrical and Computer Engineering, Worcester Polytechnic Institute, Worcester, MA, 01609, USA

    Ryszard J. Pryputniewicz

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  1. Ryszard J. Pryputniewicz
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Editors and Affiliations

  1. Academy of Athens , Soranou Efessiou 4, GR-115 27, Athens, Greece

    Anthony N. Kounadis

  2. Dept. of Civil Engineering, Democritus University of Thrace , GR-671 00, Xanthi, Greece

    Emmanuel E. Gdoutos

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Pryputniewicz, R.J. (2011). Recent Advances in Microelectromechanical Systems and Their Applications for Future Challenges. In: Kounadis, A.N., Gdoutos, E.E. (eds) Recent Advances in Mechanics. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-0557-9_14

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  • DOI: https://doi.org/10.1007/978-94-007-0557-9_14

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-007-0556-2

  • Online ISBN: 978-94-007-0557-9

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