Abstract
Surface acoustic wave (SAW) sensors with nanostructured sensing materials for gas detection are reported in this paper. The SAW sensors were fabricated based on a 128Ŷ YX-LiNbO3 substrate with an operating frequency of 145 MHz. A dual delay line configuration was adopted to eliminate external environmental fluctuations. The camphor sulfonic acid doped polyaniline nanofibres and Pt coated ZnO nanorods were employed for the detections of humidity and hydrogen due to high surface-to-volume ratio, large penetration depth and fast charge diffusion rate. The nanostructured sensing materials were synthesized by the interfacial polymerization method. Finally, the SAW sensors were tested toward humidity and hydrogen. Results show our proposed SAW sensors exhibit fast response, good sensitivity and short-term repeatability while operating at room temperature
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
Jakubik, W. P.: Investigations of thin film structures of WO3 and WO3 with Pd for hydrogen detection in a surface acoustic wave sensor system. Thin Solid Films 515 8345-8350 (2007).
Ippolito, S. J., Kandasamy, S., Kalantar-zadeh, K., Wlodarski, W., and Holland, A.: Comparison between conductometric and layered surface acoustic wave hydrogen gas sensors. Smart Materials and Structures 15 S131-S136 (2006).
Ippolito, S. J., Kandasamy, S., Kalantar-zadeh, K., Wlodarski, W., Galatsis, K., Kiriakidis, G., Katsarakis, N., and Suchea, M.: Highly sensitive layered ZnO/LiNbO3 SAW device with InOx selective layer for NO2 and H2 gas sensing. Sensors and Actuators B: Chemical 111-112 207-212 (2005).
Fechete, A. C., Wlodarski, W., Kalantar-Zadeh, K., Holland, A. S., Antoszewski, J., Kaciulis, S., and Pandolfi, L.: SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films: Response to H2 and O3 gases. Sensors and Actuators B: Chemical 118 362-367 (2006).
Nomura, T., Oofuchi, K., Yasuda, T., Furukawa, S.: SAW humidity sensor using dielectric hygroscopic polymer film. IEEE Ultrasonics Symposium 503-506 (1994).
Braga, E. R., Nakano, A. Y., da Cunha, M. P.: A SAW resonator sensor system employed in humidity measurements. SBMOEEE MlT-SIMOC'99 Proceedings 342-345 (1999).
Penza, M., Anisimkin, V.I.: Surface acoustic wave humidity sensor using polyvinylalcohol film. Sensor and Actuators A: Physical 76 162–166 (1999).
Penza, M., Cassano, G.: Relative humidity sensing by PVA-coated dual resonator SAW oscillator. Sensors and Actuators B: Chemical 68 300–306 (2000).
Tashtoush, N.M., Cheeke, J.DN., Eddy, N.: Surface acoustic wave humidity sensor based on a thin PolyXIO film, Sensors and Actuators B: Chemical 49 218–225 (1998).
Nieuwenhuizen, M. S., Nederlof, A. J.: A SAW gas sensor for carbon dioxide and water: preliminary experiments. Sensors and Actuators B: Chemical 2 97-101 (1990).
Korsah, Kofi, Ma, C. L., Dress, Bill.: Harmonic frequency analysis of SAW resonator chemical sensors: application to the detection of carbon dioxide and humidity. Sensors and Actuators B: Chemical 50 110-116 (1998).
Wu, T. T., Chen, Y. Y., Chou, T. H.: A high sensitivity nanomaterial based SAW humidity sensor. J. Phys. D: Appl. Phys. 41 085101 (2008).
Huang, F. C., Chen, Y. Y., Wu, T. T.: A room temperature SAW hydrogen sensor with Pt coated ZnO nanorods. Nanotechnology 20 065501 (2009).
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2010 Springer Science+Business Media B.V.
About this paper
Cite this paper
Chen, YY., Wu, TT., Chou, TH., Huang, FC. (2010). SAW Gas Sensor with Nanostructured Sensing Materials. In: Wu, TT., Ma, CC. (eds) IUTAM Symposium on Recent Advances of Acoustic Waves in Solids. IUTAM Bookseries, vol 26. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9893-1_40
Download citation
DOI: https://doi.org/10.1007/978-90-481-9893-1_40
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-9892-4
Online ISBN: 978-90-481-9893-1
eBook Packages: EngineeringEngineering (R0)