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Propagation Characteristics of Surface Acoustic Wave and Properties of Gas Sensors on Quartz

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IUTAM Symposium on Recent Advances of Acoustic Waves in Solids

Part of the book series: IUTAM Bookseries ((IUTAMBOOK,volume 26))

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Abstract

The simulation of wave propagation in periodic piezoelectric surface acoustic wave (SAW) structures was reported in this study. Firstly, space harmonics method (SHM) was used to analyze Rayleigh SAW propagation under a periodic Al grating. The results of SAW propagation analysis were applied to design a two-port resonator with Al grating on ST-cut quartz. The measured frequency response of the two-port resonator was approximately similar to the simulation one. Then, the chemical interface of polyaniline/WO3 composites was coated on the SAW resonator for ammonia detection. The SAW sensor responded to the ammonia gas and could be recovered using dry nitrogen. Detecting to 9.3ppm ammonia, the frequency shift was 5.9ppm, the noise level was 0.18ppm, and a signal-tonoise ratio was 32.8.

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References

  1. Timmer, B., Olthuis, W. A., Berg,van den: Ammonia sensors and their applications - a review.Sens. Actuat. B 107 666-677 (2005).

    Google Scholar 

  2. Wu, T. T., Chen, Y. Y., Chou, T. H.: A high sensitivity nanomaterial based SAW humidity sensor. J. Phys. D: Appl. Phys. 41 085101 (2008).

    Article  Google Scholar 

  3. Huang, F. C., Chen, Y. Y., Wu, T. T.: A room temperature SAW hydrogen sensor with Pt coated ZnO nanorods. Nanotechnology 20 065501 (2009).

    Article  Google Scholar 

  4. Benetti, M., Cannatà, D., Pietrantonio, F. Di, Fedosov, V. I., Verona, E.: Gigahertz-range electro-acoustic devices based on pseudosurface-acoustic waves in AlN/diamond/Si structures. Appl. Phys. Let. 87 033504 (2005).

    Article  Google Scholar 

  5. Makkonen, T., Plessky, V. P.: Modeling longitudinal leaky saw propagation under periodic electrode arrays. Proc. IEEE Ultrason. Symp. 691-694 (2005).

    Google Scholar 

  6. Hofer, M., Finger, N., Kovacs, G., Zaglmayr, S., Langer, U., Lerch, R.: Finite-element simulation of wave propagation in periodic piezoelectric SAW structures. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 53 1192-1201 (2006).

    Article  Google Scholar 

  7. Laude, V., Reinhardt, A., Wilm, M., Khelif, A., Ballandras, S.: Fast FEM/BEM simulation of SAW devices via asymptotic waveform evaluation. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 51 359-363 (2004).

    Article  Google Scholar 

  8. Duran, M., Nedelec, J. C., Ossandon, S.: Numerical study of the spectral 3-D Green’s function singularities for piezoelectric SAW components. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 52 2395-2402 (2005).

    Article  Google Scholar 

  9. Laude, V., Hanckes, C. F. J., Ballandras, S.: Surface Green’s function of a piezoelectric half-space. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 53 420-428 (2006).

    Article  Google Scholar 

  10. Kitabayashi, H., Smith, P. M.: Analysis of SAW propagation in gratings on ZnO/diamond substrates. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 51 249-261 (2001).

    Article  Google Scholar 

  11. Sato, T., Abe, H.: Propagation of longitudinal leaky surface waves under periodic metal grating structure on lithium tetraborate. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 45 394-408 (1998).

    Article  Google Scholar 

  12. Kovalenko, V. V., Zhukova, A. A., Rumyantseva, M. N., Gaskov, A. M., Yushchenko, V. V., Ivanova, I. I., Pagnier, T.: Surface chemistry of nanocrystalline SnO2: Effect of thermal treatment and additives.Sens. Actuat. B 126 52-55 (2007).

    Google Scholar 

  13. Karunagaran, B., Uthirakumar, P., Chung, S. J., Velumani, S., Suh, E. K.: TiO2 thin film gas sensor for monitoring ammonia, Materials Characterization. 58 680-684 (2007).

    Article  Google Scholar 

  14. Sengupta, P. P., Barik, S., Adhikari, B.: Polyaniline as a gas-sensor material. Materials and Manufacturing Processes 21 263-270 (2006).

    Article  Google Scholar 

  15. Koul, S., Chandra, R.: Mixed dopant conducting polyaniline reusable blend for the detection of aqueous ammonia, Sens. Actuat. B 104 57-67 (2005).

    Google Scholar 

  16. Pissoort, D., Michielssen, E., Olyslager, F., Zutter, D. D.: Fast analysis of 2D electromagnetic crystal structures using a periodic Green function approach, IEEE J. Lightwave Technol. 23 2294-2308 (2005).

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Electrical Engineering, I- Shou University, Kaohsiung County, 84001, Taiwan

    Chi-Yen Shen, Cheng-Liang Hsu, Ming-Yau Su & Rume-Tze Tsai

  2. Department of Chemical Engineering, I- Shou University, Kaohsiung County, 84001, Taiwan

    Shih-Han Wang

Authors
  1. Chi-Yen Shen
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  2. Cheng-Liang Hsu
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  3. Ming-Yau Su
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  4. Rume-Tze Tsai
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  5. Shih-Han Wang
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Correspondence to Chi-Yen Shen .

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Editors and Affiliations

  1. Institute of Applied Mechanics, Dept. Mechanical Engineering, National Taiwan University, Roosevelt Road 1, Taipei, 10617, Taiwan R.O.C.

    Tsung-Tsong Wu

  2. Dept. Mechanical Engineering, National Taiwan University, Roosevelt Rd. 1, Taipei, 106, Taiwan R.O.C.

    Chien-Ching Ma

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Shen, CY., Hsu, CL., Su, MY., Tsai, RT., Wang, SH. (2010). Propagation Characteristics of Surface Acoustic Wave and Properties of Gas Sensors on Quartz. In: Wu, TT., Ma, CC. (eds) IUTAM Symposium on Recent Advances of Acoustic Waves in Solids. IUTAM Bookseries, vol 26. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9893-1_27

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  • DOI: https://doi.org/10.1007/978-90-481-9893-1_27

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-9892-4

  • Online ISBN: 978-90-481-9893-1

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