Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices

  • Ken-ya Hashimoto
  • Nan Wu
  • Keisuke Kashiwa
  • Tatsuya Omori
  • Masatsune Yamaguchi
  • Osamu Takano
  • Sakae Meguro
  • Naoki Kasai
  • Koichi Akahane
Conference paper
Part of the IUTAM Bookseries book series (IUTAMBOOK, volume 26)

Abstract

This paper reviews a phase-sensitive and fast-scanning laser probingsystem developed by the authors’ group for the diagnosis of radio frequency (RF)surface and bulk acoustic wave (SAW/BAW) devices. The system is based on theSagnac interferometer, which is insensitive to low frequency vibration. From thisfeature, we can maximize the scanning speed without sacrificing the signal-tonoiseratio of the measurement. It is demonstrated that high quality twodimensional(2D) image of SAW/BAW field patterns can be captured in minutesorder. Currently the maximum applicable frequency is about 2.5 GHz. Because ofthe phase sensitivity, the measured field in the space domain is readily convertedinto the wavenumber domain by the 2D Fourier Transform. It is also demonstratedhow effective the wavenumber domain analysis is for the purpose.

Keywords

Radio Frequency Lamb Wave Laser Probe Device Under Test Bulk Acoustic Wave 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  • Ken-ya Hashimoto
    • 1
  • Nan Wu
    • 1
  • Keisuke Kashiwa
    • 1
  • Tatsuya Omori
    • 1
  • Masatsune Yamaguchi
    • 1
  • Osamu Takano
    • 2
  • Sakae Meguro
    • 2
  • Naoki Kasai
    • 2
  • Koichi Akahane
    • 2
  1. 1.Graduate School of EngineeringChiba UniversityChibaJapan
  2. 2.Neoark Co. LtdTokyoJapan

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